Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu May 24 09:45:43 PDT 2007
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Comment wafersaw SNF 2007-05-14 17:37:52: chuck not cleaned thoroughly by previous users
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Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
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Comment wafersaw SNF 2007-05-14 17:37:52: chuck not cleaned thoroughly by previous users
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Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.
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