Shutdown wafersaw SNF 2007-05-24 09:45:43: Shutdown for di water line tie in for the new cmp tool.

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri May 25 09:09:03 PDT 2007

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Tie in done.  Waferesaw is OK.

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Next message: Comment wafersaw SNF 2007-04-01 18:48:31: O-ring, light fixed
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