Problem wafersaw SNF 2007-09-20 17:04:29: Tetha motor stuck

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 18 14:43:22 PDT 2007


Cleaned space between chuck and frame with ipa. Rotated chuck back and forth from Index1 to Index 2 with no problems.  If the chuck does get stuck and errors for "Theta motor problem", press the index button again and the chuck will complete its rotation. 




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