Problem wafersaw SNF 2007-09-20 17:04:29: Tetha motor stuck

closega at snf.stanford.edu closega at snf.stanford.edu
Thu Sep 20 17:04:30 PDT 2007


As I unloaded my wafer, the stage stopped rotating, and the following message appeared "theta motor stuck". By pressing "index I" once more, the stage finally rotated into the unload position, and I was able to unload my wafer w/o any problems.




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