Shutdown wafersaw SNF 2009-12-08 17:27:58: limit stop reached on T-axis, CCW

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Tue Dec 8 17:27:59 PST 2009

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While unloading wafer, the machine gave an error of reaching the limit stop on T-axis - CCW.

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