From mtang at snf.stanford.edu Wed Aug 11 18:43:03 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 11 Aug 2010 18:43:03 -0700 Subject: Problem wafersaw SNF 2010-08-11 18:43:02: Sprayer, air gun and vacuum pin problems Message-ID: Hand sprayer is disconnected (leaking), air gun tip is broken off, and the vacuum pin is stuck. The vacuum pin is stuck at the 100 mm wafer ring, so if you have something smaller, it would be best to mount it on a 100 mm carrier wafer. The air gun on the adjacent solvent bench is long enough to reach the chuck, so this can be used for now. And yes, the water switch still need to be replaced, so water needs to be turned on/off manually. From rostam at snf.stanford.edu Wed Aug 11 18:43:48 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 11 Aug 2010 18:43:48 -0700 Subject: Problem wafersaw SNF 2010-08-11 18:43:47: 3 new problems, 1 old problem Message-ID: 3 new ones - chuck pin doesn't come off and can't adjust the chuck oring - water gun broken - air gun broken 1 old one - automatic water rinse (during cutting) doesn't work From eenriquez at snf.stanford.edu Thu Aug 12 08:57:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Aug 2010 08:57:08 -0700 Subject: Shutdown wafersaw SNF 2010-08-12 08:57:07: Vacuum pin repair Message-ID: Removed the vacuum adjustment pin. Found the pin assembly had been bent. Also, the set screw on the knurled piece had broken off. Now repairing the damaged pieces. From mdickey at snf.stanford.edu Thu Aug 12 11:19:54 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 12 Aug 2010 11:19:54 -0700 Subject: Comment wafersaw SNF 2010-08-12 11:19:54: Spray gun Message-ID: Spray gun working with different hose From cbaxter at snf.stanford.edu Thu Aug 12 14:21:27 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Aug 2010 14:21:27 -0700 Subject: Shutdown wafersaw SNF 2010-08-12 08:57:07: Vacuum pin repair Message-ID: Still need to replace the cooling water valve.. From cbaxter at snf.stanford.edu Thu Aug 12 14:25:42 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Aug 2010 14:25:42 -0700 Subject: Comment wafersaw SNF 2010-08-12 14:25:41: Update Message-ID: Still need to replaced the faulty water valve, working finding a direct replacement.. From mkerby at snf.stanford.edu Thu Aug 12 15:40:09 2010 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Thu, 12 Aug 2010 15:40:09 -0700 Subject: Problem wafersaw SNF 2010-08-12 15:40:08: Index II - eats blades Message-ID: The table may not be level. Cuts fine top, middle and bottom of 4" wafer in index I. Two blade broke on Index II on two separate wafers in the middle cut. Sounded too deep although all proper procedures followed. From mtang at snf.stanford.edu Thu Aug 12 20:24:54 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:24:54 -0700 Subject: Problem wafersaw SNF 2010-08-12 15:40:08: Index II - eats blades Message-ID: This is likely due to the bug described in section 7.1 (troubleshooting) of the operating procedures. To avoid this problem (and not have to think about it) it is recommended to use X/Y to specify cut dimensions, not Diameter. From mtang at snf.stanford.edu Thu Aug 12 20:26:06 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:26:06 -0700 Subject: Problem wafersaw SNF 2010-08-11 18:43:02: Sprayer, air gun and vacuum pin problems Message-ID: Water sprayer and vacuum pin problems repaired (many thanks, Jim and Mike!) Cesar is still working on the solenoid and Jim on the air gun,. From mtang at snf.stanford.edu Thu Aug 12 20:26:14 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:26:14 -0700 Subject: Problem wafersaw SNF 2010-08-11 18:43:47: 3 new problems, 1 old problem Message-ID: Water sprayer and vacuum pin problems repaired (many thanks, Jim and Mike!) Cesar is still working on the solenoid and Jim on the air gun,. From mtang at snf.stanford.edu Thu Aug 12 20:26:27 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:26:27 -0700 Subject: Problem wafersaw SNF 2010-08-12 20:26:27: Message-ID: From mtang at snf.stanford.edu Thu Aug 12 20:27:36 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:27:36 -0700 Subject: Problem wafersaw SNF 2010-08-12 20:27:35: Water valve Message-ID: Just a reminder that the water needs to be turned on manually (using the flow meter knob), until the automatic water switch is replaced (Cesar is working on this) Also, the air gun is not working (Jim is working on it). In the meantime, the adjacent solvent bench air gun reached to the chuck (not as strong, but it works.) From mtang at snf.stanford.edu Thu Aug 12 20:27:40 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:27:40 -0700 Subject: Problem wafersaw SNF 2010-08-12 20:26:27: Message-ID: From mtang at snf.stanford.edu Thu Aug 12 20:27:48 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Aug 2010 20:27:48 -0700 Subject: Problem wafersaw SNF 2010-06-24 13:53:15: Reminder: Water valve Message-ID: See update From eenriquez at snf.stanford.edu Fri Aug 13 07:29:20 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:29:20 -0700 Subject: Comment wafersaw SNF 2010-07-26 10:32:51: pump Message-ID: pump is ok From usha at snf.stanford.edu Fri Aug 13 10:15:00 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Fri, 13 Aug 2010 10:15:00 -0700 Subject: Comment wafersaw SNF 2010-08-13 10:15:00: Offset Message-ID: Head moves in y-direction after single cut command; From mdickey at snf.stanford.edu Tue Aug 17 09:01:56 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Aug 2010 09:01:56 -0700 Subject: Shutdown wafersaw SNF 2010-08-17 09:01:56: switch Message-ID: down for water switch change From mtang at snf.stanford.edu Tue Aug 17 11:59:16 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 11:59:16 -0700 Subject: Shutdown wafersaw SNF 2010-08-17 09:01:56: switch Message-ID: From mtang at snf.stanford.edu Tue Aug 17 12:01:26 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:01:26 -0700 Subject: Shutdown wafersaw SNF 2010-08-17 12:01:26: water valve Message-ID: From mtang at snf.stanford.edu Tue Aug 17 12:02:18 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:02:18 -0700 Subject: Shutdown wafersaw SNF 2010-08-17 12:01:26: water valve Message-ID: Water valve was replaced. With the air and water gun repairs, the system is JUST about where it should be. (Thanks guys -- Mike, Jim, Cesar, Elmer.) From mtang at snf.stanford.edu Tue Aug 17 12:02:31 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:02:31 -0700 Subject: Problem wafersaw SNF 2010-08-12 20:27:35: Water valve Message-ID: Mike replaced. It works! From mtang at snf.stanford.edu Tue Aug 17 12:02:49 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:02:49 -0700 Subject: Comment wafersaw SNF 2010-08-12 14:25:41: Update Message-ID: Mike replaced. From mtang at snf.stanford.edu Tue Aug 17 12:03:08 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:03:08 -0700 Subject: Comment wafersaw SNF 2010-08-13 10:15:00: Offset Message-ID: Reset by next user. From mtang at snf.stanford.edu Tue Aug 17 12:04:02 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:04:02 -0700 Subject: Problem wafersaw SNF 2010-01-25 16:44:41: Manually turn on/off the water Message-ID: Repaired. See Coral message on 8/17/10. From mtang at snf.stanford.edu Tue Aug 17 12:04:16 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:04:16 -0700 Subject: Problem wafersaw SNF 2010-02-22 10:54:59: Warning: Water must be manually turned on Message-ID: Repaired. See Coral message on 8/17/10. From mtang at snf.stanford.edu Tue Aug 17 12:04:52 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 12:04:52 -0700 Subject: Problem wafersaw SNF 2010-03-03 12:03:54: Water leak Message-ID: Mike repaired this, 8/13/10. From mtang at snf.stanford.edu Tue Aug 17 15:41:11 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 15:41:11 -0700 Subject: Problem wafersaw SNF 2010-03-01 13:03:58: blade slams into wafer 1/2 way through Message-ID: I believe this was the wafer diameter bug (see operating procedures section 7.) From mtang at snf.stanford.edu Tue Aug 17 15:41:34 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 15:41:34 -0700 Subject: Problem wafersaw SNF 2010-03-17 19:25:53: water leakage Message-ID: The pump has been replaced since then. From mtang at snf.stanford.edu Tue Aug 17 15:42:10 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 15:42:10 -0700 Subject: Problem wafersaw SNF 2010-08-17 15:42:09: Water spray gun Message-ID: is not working. From mtang at snf.stanford.edu Tue Aug 17 15:43:13 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 15:43:13 -0700 Subject: Problem wafersaw SNF 2010-08-17 15:43:13: Air gun Message-ID: works, but the nose needs to be replaced. (Be careful with it.) From mtang at snf.stanford.edu Tue Aug 17 16:46:34 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 17 Aug 2010 16:46:34 -0700 Subject: Comment wafersaw SNF 2010-08-17 16:46:33: Water valve works! Message-ID: Dear wafersaw users: The water valve has been repaired!!! It has not worked properly since January, so everyone has been manually turning the water on and off at the flow meter. NO LONGER! The automatic water valve now works! So, the "New" procedures (actually, the old one, pre-January): 1. Make sure the flow meter is ON. The knob should be open, about 1/4 - 1/2 turn counter clockwise from fully closed. Make sure to check this -- if the water is not on when you cut, you are cutting dry and the blade or your wafer will break. 2. Water flow can be adjusted only while cutting (using the flow meter knob.) The flow should be around 10 but probably no more than 15, from the top of the float. 3. DO NOT turn the flow meter knob to the off position. It could mess up the next person. Any problems, please report on Coral. Thanks! Team Etch From mdickey at snf.stanford.edu Wed Aug 18 10:16:01 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 18 Aug 2010 10:16:01 -0700 Subject: Problem wafersaw SNF 2010-08-17 15:42:09: Water spray gun Message-ID: Works now with toggle switch in off position From mtang at snf.stanford.edu Wed Aug 18 11:20:48 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 18 Aug 2010 11:20:48 -0700 Subject: Problem wafersaw SNF 2010-08-18 11:20:48: Water spray gun Message-ID: Kind of works. It looks like it's tied to water after the solenoid valve to the blade (instead of before.) From mdickey at snf.stanford.edu Thu Aug 19 09:02:59 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Aug 2010 09:02:59 -0700 Subject: Shutdown wafersaw SNF 2010-08-19 09:02:58: Regulator change Message-ID: Down for install of a higher flow air regulator From mdickey at snf.stanford.edu Thu Aug 19 09:27:03 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 19 Aug 2010 09:27:03 -0700 Subject: Shutdown wafersaw SNF 2010-08-19 09:02:58: Regulator change Message-ID: Will change at another date From mdickey at snf.stanford.edu Fri Aug 20 10:16:04 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Aug 2010 10:16:04 -0700 Subject: Comment wafersaw SNF 2010-08-20 10:16:04: regulator Message-ID: Installed new CDA regulator From jtsai at snf.stanford.edu Fri Aug 20 14:52:11 2010 From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu) Date: Fri, 20 Aug 2010 14:52:11 -0700 Subject: Problem wafersaw SNF 2010-08-20 14:52:11: valve does not fully shut off the water Message-ID: the valve does not fully shut off the water. so, I manually adjust the knob on the flow meter to operate the dicer. From jparker at snf.stanford.edu Wed Aug 25 12:58:03 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 25 Aug 2010 12:58:03 -0700 Subject: Problem wafersaw SNF 2010-08-25 12:58:03: Not taking commands Message-ID: Cannot do things like Unload, Index I, Index II, etc. Looks like computer is locked up from troubleshooting. Looking for staff help, but note that a wafer and blade is loaded (spindle ON) currently because I can't unload (Wed. afternoon). From jparker at snf.stanford.edu Wed Aug 25 13:02:14 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 25 Aug 2010 13:02:14 -0700 Subject: Comment wafersaw SNF 2010-08-25 13:02:14: My problem fixed Message-ID: "Computer not taking commands" problem above fixed by Mary Tang. Thanks. Please ignore/clear that problem. From srikantv at snf.stanford.edu Thu Aug 26 19:04:39 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Thu, 26 Aug 2010 19:04:39 -0700 Subject: Shutdown wafersaw SNF 2010-08-26 19:04:39: vacuum chuck not working Message-ID: wafer flies off chuck during dicing From mdickey at snf.stanford.edu Fri Aug 27 08:29:37 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 27 Aug 2010 08:29:37 -0700 Subject: Shutdown wafersaw SNF 2010-08-26 19:04:39: vacuum chuck not working Message-ID: vacuum pin was in the wrong position From mtang at snf.stanford.edu Mon Aug 30 15:45:10 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 30 Aug 2010 15:45:10 -0700 Subject: Problem wafersaw SNF 2010-08-25 12:58:03: Not taking commands Message-ID: See comment, 8/25. (System was in the middle of a routine, waiting for command.) From mtang at snf.stanford.edu Mon Aug 30 16:01:53 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 30 Aug 2010 16:01:53 -0700 Subject: Problem wafersaw SNF 2010-08-20 14:52:11: valve does not fully shut off the water Message-ID: From mtang at snf.stanford.edu Mon Aug 30 16:22:16 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 30 Aug 2010 16:22:16 -0700 Subject: Problem wafersaw SNF 2010-08-17 15:43:13: Air gun Message-ID: Works nicely. From mtang at snf.stanford.edu Mon Aug 30 16:24:22 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 30 Aug 2010 16:24:22 -0700 Subject: Comment wafersaw SNF 2010-08-30 16:24:21: Water valve works Message-ID: Not sure about the 8/20 problem report. The solenoid works. Please make sure that the flow knob is NOT closed before using.