Problem wafersaw SNF 2010-08-11 18:43:02: Sprayer, air gun and vacuum pin problems

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed Aug 11 18:43:03 PDT 2010


Hand sprayer is disconnected (leaking), air gun tip is broken off, and the vacuum pin is stuck.  
The vacuum pin is stuck at the 100 mm wafer ring, so if you have something smaller, it would be best to mount it on a 100 mm carrier wafer.  
The air gun on the adjacent solvent bench is long enough to reach the chuck, so this can be used for now.
And yes, the water switch still need to be replaced, so water needs to be turned on/off manually.




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