Problem wafersaw SNF 2010-02-17 16:05:21: vacuum can't be turned on
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Feb 17 19:08:15 PST 2010
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Problem wafersaw SNF 2010-02-17 16:05:21: vacuum can't be turned on
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Problem wafersaw SNF 2010-02-19 11:45:15: vacuum can't be turned on
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Replaced the wafer vacuum pump.
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Problem wafersaw SNF 2010-02-17 16:05:21: vacuum can't be turned on
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Problem wafersaw SNF 2010-02-19 11:45:15: vacuum can't be turned on
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