Problem wafersaw SNF 2010-03-25 09:53:02: screw for O-ring for the chuck vavuum pin

mkuemmel at snf.stanford.edu mkuemmel at snf.stanford.edu
Thu Mar 25 09:53:03 PDT 2010


O-ring was not in the position for the 4" wafers, but for smaller wafers. Could not change position because screw is too tight.




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