From eenriquez at snf.stanford.edu Tue Oct 5 15:34:46 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Oct 2010 15:34:46 -0700 Subject: Shutdown wafersaw SNF 2010-10-05 15:34:46: Annual PM Message-ID: Performing annual preventive maintenance From mtang at snf.stanford.edu Wed Oct 6 15:58:53 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 15:58:53 -0700 Subject: Shutdown wafersaw SNF 2010-10-05 15:34:46: Annual PM Message-ID: Done! It's beautiful! Many thanks, Northeast and Jim H!!! From mtang at snf.stanford.edu Wed Oct 6 16:00:04 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 16:00:04 -0700 Subject: Problem wafersaw SNF 2010-09-23 15:01:36: y offset about 0.8mm in autocut mode Message-ID: This is because alignment in autocuts needs to be done on one of the lines to be cut. Will update operating procedures to make this clear. From mtang at snf.stanford.edu Wed Oct 6 16:00:19 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 16:00:19 -0700 Subject: Problem wafersaw SNF 2010-09-23 15:58:13: Vacuum pin is not 6 o'clock Message-ID: Just needed to be aligned. From mtang at snf.stanford.edu Wed Oct 6 16:00:29 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 16:00:29 -0700 Subject: Problem wafersaw SNF 2010-09-02 15:27:29: Vacuum isn't great Message-ID: vacuum is fine after PM. From mtang at snf.stanford.edu Wed Oct 6 16:00:39 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 16:00:39 -0700 Subject: Problem wafersaw SNF 2010-09-01 16:00:20: is the vac pump supposed to be swimming in water? Message-ID: Vacuum is fine after PM. From mtang at snf.stanford.edu Wed Oct 6 16:00:58 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 16:00:58 -0700 Subject: Problem wafersaw SNF 2010-08-18 11:20:48: Water spray gun Message-ID: Reconnected correctly and works properly now. From mtang at snf.stanford.edu Wed Oct 6 16:02:48 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 6 Oct 2010 16:02:48 -0700 Subject: Comment wafersaw SNF 2010-10-06 16:02:47: New Vacuum Pump Message-ID: Annual PM was done and the system works quite nicely now. Please note that there is now a venturi vacuum instead of the diaphragm pump. To turn on the pump, turn the black handle below the N2 gun downward to the VAC ON position. It makes a hissing noise, not pleasant, but normal. The nice thing is that there are no moving parts on this. Please make sure to turn it off when you are done. From jparker at snf.stanford.edu Tue Oct 12 17:44:57 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 12 Oct 2010 17:44:57 -0700 Subject: Problem wafersaw SNF 2010-10-12 17:44:56: Water leak Message-ID: Water leaking near the blade. Temporary solution to doing height alignment without water getting in the way is turn off water using clear plastic flow valve near monitor (may have to untape), but do not forget to turn water back on before dicing. From jparker at snf.stanford.edu Tue Oct 12 18:06:38 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 12 Oct 2010 18:06:38 -0700 Subject: Problem wafersaw SNF 2010-10-12 18:06:37: Water leak to floor Message-ID: After sawing for about an hour, saw a larger water leak flowing onto the floor near the right, front foot (right while facing the machine). From jparker at snf.stanford.edu Tue Oct 12 18:25:42 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 12 Oct 2010 18:25:42 -0700 Subject: Problem wafersaw SNF 2010-10-12 18:25:42: Purge pressure excessive Message-ID: After hitting "unload," purge pressure was so high that it blew O-ring pin out about 1". This resulted in an extra hole being exposed on the chuck during unload and a small geyser of water up to about head level. From trejo10 at snf.stanford.edu Wed Oct 13 12:26:45 2010 From: trejo10 at snf.stanford.edu (trejo10 at snf.stanford.edu) Date: Wed, 13 Oct 2010 12:26:45 -0700 Subject: Problem wafersaw SNF 2010-10-13 12:26:44: similar to previous user Message-ID: Water leak by the chuck. Made alligning difficult. Waaah Water noises in the pump. Led to water leakage on the floor. Waaah High pressure after unload. My wafer got prematurely cleaved. Waaah From mdickey at snf.stanford.edu Wed Oct 13 13:53:13 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Oct 2010 13:53:13 -0700 Subject: Shutdown wafersaw SNF 2010-10-13 13:53:12: test Message-ID: Installed different water valve. Mary to test before releasing. From mtang at snf.stanford.edu Wed Oct 13 15:56:43 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 13 Oct 2010 15:56:43 -0700 Subject: Shutdown wafersaw SNF 2010-10-13 13:53:12: test Message-ID: Looks OK. Ran a few cuts on a wafer and -- with Jim H's help -- checked water flow and plumbing. Because the replacement solenoid is a different size, the side panel doesn't fit on and has been left off for now. What it means is that the venturi pump is really loud when it's on. This will get replaced later, I trust. From nxs4059 at snf.stanford.edu Fri Oct 15 11:12:56 2010 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Fri, 15 Oct 2010 11:12:56 -0700 Subject: Problem wafersaw SNF 2010-10-15 11:12:55: Chuck Vacuum Pin Handle came off Message-ID: The little, exposed handle for the Vacuum chuck pin has come off, leaving a portion of the pin in the chuck. It seems to be in the 4th position and still usable for 4 inch wafers. The pin head is in the red toolbox. From mdickey at snf.stanford.edu Mon Oct 18 14:06:00 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 18 Oct 2010 14:06:00 -0700 Subject: Problem wafersaw SNF 2010-10-15 11:12:55: Chuck Vacuum Pin Handle came off Message-ID: Retrieved other half of pin. Make sure it is tight before changing From mtang at snf.stanford.edu Mon Oct 18 16:15:22 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Oct 2010 16:15:22 -0700 Subject: Problem wafersaw SNF 2010-10-12 17:44:56: Water leak Message-ID: Mike replaced the water valve on 10/13. OK now. From mtang at snf.stanford.edu Mon Oct 18 16:15:34 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Oct 2010 16:15:34 -0700 Subject: Problem wafersaw SNF 2010-10-12 18:06:37: Water leak to floor Message-ID: Mike replaced the water valve on 10/13. OK now. From mtang at snf.stanford.edu Mon Oct 18 16:15:53 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Oct 2010 16:15:53 -0700 Subject: Problem wafersaw SNF 2010-10-13 12:26:44: similar to previous user Message-ID: Mike replaced the water valve on 10/13. OK now. From igorpapa at snf.stanford.edu Wed Oct 20 19:36:24 2010 From: igorpapa at snf.stanford.edu (igorpapa at snf.stanford.edu) Date: Wed, 20 Oct 2010 19:36:24 -0700 Subject: Comment wafersaw SNF 2010-10-20 19:36:23: small water leak Message-ID: there was a small waterleak present when I was dicing quarts at 22KRPM, which did not repeat when I was dicing silicon at 10KRPM. From karthikv at snf.stanford.edu Thu Oct 21 13:51:32 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 21 Oct 2010 13:51:32 -0700 Subject: Problem wafersaw SNF 2010-10-21 13:51:31: Water leak Message-ID: Water is leaking to the floor from the wafersaw on the right hand side. The leak started after dicing 2 wafers. From mtang at snf.stanford.edu Tue Oct 26 21:22:53 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Oct 2010 21:22:53 -0700 Subject: Problem wafersaw SNF 2010-10-26 21:22:52: Water leak Message-ID: Mike D worked on this in the morning and found that the water is leaking from the venturi vacuum pump. Water can be entering the vacuum line either through the badly scored chuck surface or through another breach elsewhere in the vacuum line. Neither of these is likely to be easily resolved soon, especially we had a field service in a couple of weeks ago to look specifically at this. However, the venturi pump drains the water, so aside from the inconvenience of dripping, it should not significantly affect operation of the system. We will need to work on pinpointing where it is leaking. Please make sure that your blue tape goes on without bubbles -- this will help the wafer seal better to the vacuum chuck.