Problem wafersaw SNF 2010-10-12 18:25:42: Purge pressure excessive

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Oct 12 18:25:42 PDT 2010


After hitting "unload," purge pressure was so high that it blew O-ring pin out about 1". This resulted in an extra hole being exposed on the chuck during unload and a small geyser of water up to about head level.




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