From eenriquez at snf.stanford.edu Thu Dec 1 14:58:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:58:17 -0800 Subject: Shutdown wafersaw SNF 2011-11-14 16:02:03: CWW limit switch Message-ID: Field service replaced the limit switch wiring harness. He also performed a PM and calibrated the x axis From eenriquez at snf.stanford.edu Thu Dec 1 14:58:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:58:30 -0800 Subject: Comment wafersaw SNF 2011-11-15 16:29:16: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Dec 1 14:58:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:58:37 -0800 Subject: Comment wafersaw SNF 2011-11-17 11:56:28: Update CCW limit switch Message-ID: Archived From eenriquez at snf.stanford.edu Thu Dec 1 14:58:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:58:45 -0800 Subject: Comment wafersaw SNF 2011-11-05 00:33:01: Message-ID: From eenriquez at snf.stanford.edu Thu Dec 1 14:58:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:58:57 -0800 Subject: Comment wafersaw SNF 2011-11-21 22:32:26: Vendor due in 11/30 Message-ID: Archived From eenriquez at snf.stanford.edu Thu Dec 1 14:59:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:59:10 -0800 Subject: Problem wafersaw SNF 2011-11-01 11:49:34: Y value error during allignment Message-ID: Field service replaced the limit switch wiring harness. He also performed a PM and calibrated the x axis From eenriquez at snf.stanford.edu Thu Dec 1 14:59:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:59:15 -0800 Subject: Problem wafersaw SNF 2011-10-20 16:12:34: Limit switch problems Message-ID: Field service replaced the limit switch wiring harness. He also performed a PM and calibrated the x axis From eenriquez at snf.stanford.edu Thu Dec 1 14:59:31 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:59:31 -0800 Subject: Problem wafersaw SNF 2011-08-09 14:32:06: Message-ID: Field service replaced the limit switch wiring harness. He also performed a PM and calibrated the x axis From eenriquez at snf.stanford.edu Thu Dec 1 14:59:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2011 14:59:52 -0800 Subject: Comment wafersaw SNF 2011-08-17 00:23:25: Disregard prev. comment Message-ID: Archived From eperalta at snf.stanford.edu Fri Dec 2 12:04:12 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 2 Dec 2011 12:04:12 -0800 Subject: Comment wafersaw SNF 2011-12-02 12:04:11: how i found the tool... Message-ID: There were dirty wipes, and a bunch of wafer pieces on the ground around it. Clear dry air valve was left open. From eperalta at snf.stanford.edu Fri Dec 2 12:04:40 2011 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 2 Dec 2011 12:04:40 -0800 Subject: Problem wafersaw SNF 2011-12-02 12:04:39: Air gun does not work Message-ID: From rhenn at snf.stanford.edu Fri Dec 2 18:28:33 2011 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Fri, 2 Dec 2011 18:28:33 -0800 Subject: Problem wafersaw SNF 2011-12-02 18:28:33: Spindle Overload Error Message-ID: Recieved spindle overload error during sawing silicon wafer. From cmcg at snf.stanford.edu Wed Dec 7 18:21:38 2011 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 7 Dec 2011 18:21:38 -0800 Subject: Comment wafersaw SNF 2011-12-07 18:21:38: spindle overload Message-ID: spindle overload error after cutting half way across wafer. There was an audible vibration sound. I reduced the cut depth to 200um, reduced the feed rate to 2mm/sec, and increased the spindle speed to 22krpm. The next cut was successful, though some vibration was there. I increased the cut depth to 500um, success. After about 10 cuts same error. Trying the same parameters once again the cut was successful. The problem never occured again. This was a standard silicon wafer with oxide dep. From latta at snf.stanford.edu Thu Dec 15 16:15:35 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 15 Dec 2011 16:15:35 -0800 Subject: Shutdown wafersaw SNF 2011-12-15 16:15:34: Message-ID: