Problem wafersaw SNF 2012-04-17 22:56:51: error: y-axis front bad

kokab at snf.stanford.edu kokab at snf.stanford.edu
Tue Apr 17 22:56:51 PDT 2012


for street align defenition, it gave an error of "y-axis front bad" and basically didn't let me to do any thing. I reset it but again the same error came up. I couldn't take  my quartz blade out of the tool since it was not going to the unload position.




More information about the wafersaw-pcs mailing list