From shott at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Jun 25, 2000 Subject: Shutdown Clear wafersaw: Wafersaw operational ... Message-ID: The wafersaw has a new spindle, rejuvenated 5V supply (including battery backup) and has recalibrated X/Y/Z axes. Also, replacement bands on theta stage. Please use carefully, John From snodgras at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: snodgras at snf.stanford.edu (snodgras at snf.stanford.edu) Date: Jul 27, 2000 Subject: Shutdown wafersaw: wafersaw limit switch stuck on Message-ID: Walked up to the machine, turned it on, after 30s. power up count down, machine went to limit switch screen. CCW switch reports "BAD." Attempted to turn theta motor first CW, then CCW, both report "CAN'T" From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 31, 2000 Subject: Shutdown Clear wafersaw: rebooted saw. Message-ID: From sjlee at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Aug 11, 2000 Subject: Problem wafersaw: wafersaw blade broken Message-ID: From kasnavi at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: kasnavi at snf.stanford.edu (kasnavi at snf.stanford.edu) Date: Aug 17, 2000 Subject: Problem wafersaw: spindle error Message-ID: spindle over-ride error while cutting glass wafers, 8/17, 6:15pm. Reza Kasnavi From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear wafersaw: cleaned spindle & replaced blade. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear wafersaw: no spindle error visible. Message-ID: From griffin at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Aug 22, 2000 Subject: Problem wafersaw: Message-ID: microscope did not seem to work well - image on camera did not align well From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 25, 2000 Subject: Problem Clear wafersaw: Message-ID: From damaids at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: damaids at snf.stanford.edu (damaids at snf.stanford.edu) Date: Aug 31, 2000 Subject: Problem wafersaw: video monitor on the fritz Message-ID: the microscope appears to have problems... the light is on but I can't see anything From krishnan at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: krishnan at snf.stanford.edu (krishnan at snf.stanford.edu) Date: Sep 7, 2000 Subject: Problem wafersaw: wafersaw camera not working Message-ID: Not only is the monitor on the wafersaw not working properly (as pointed out by another user), the camera does not display anything on the screen). From snodgras at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: snodgras at snf.stanford.edu (snodgras at snf.stanford.edu) Date: Sep 12, 2000 Subject: Problem wafersaw: Saw is UP, Camera is DOWN Message-ID: The saw is useable, as long as you don't need to align your sample. Camera is definitely out. Be aware that there is a +3mm offset currently programmed in. From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 21, 2000 Subject: Problem Clear wafersaw: Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 21, 2000 Subject: Problem Clear wafersaw: Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 21, 2000 Subject: Problem Clear wafersaw: Eugene found video working OK. Message-ID: From fmwang at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: fmwang at snf.stanford.edu (fmwang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-09-13 17:16:51: can finish Height calibration Message-ID: <20470763.160.1347581811873.JavaMail.coral@shine> I tried a couple of time for height calibration, but after more than 10 min, the calibration couldn't finish. Blade kept colse to the chuck, but couldn't make a contact. From mtang at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-09-13 17:16:51: can finish Height calibration Message-ID: <5234449.0.1347634406528.JavaMail.coral@shine> Not sure what was wrong. System checks out fine. The following user enabled for some hours, suggesting she had no problem either. Will follow up with this user. From chen0622 at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-09-19 13:59:41: system frozen Message-ID: <19504710.40.1348088382007.JavaMail.coral@shine> the system was initially frozen before start. With the help of Elmer and Mary to reboot the system several times, the system recovers again. From cbaxter at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-09-19 13:59:41: system frozen Message-ID: <14635671.87.1348181555298.JavaMail.coral@shine> Powered down the tool and cleaned the contact axis pcb's. From jackson at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-10-23 00:00:52: could not get vacuum pull on my wafers Message-ID: <17213668.31.1350975653093.JavaMail.coral@shine> hi, yes enable, and pump toggle turned on but no vacuum. tried other wafers and still no vacuum. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-10-23 00:00:52: could not get vacuum pull on my wafers Message-ID: <11943637.36.1351007362269.JavaMail.coral@shine> No problem found. Turned the vacuum valve on and placed the saw in inspection mode. From gyama at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-11-20 09:25:39: Sorry, the tip for the air gun came Message-ID: <3969812.0.1353432340511.JavaMail.coral@shine> loose, went to use it & it fell. Looked in the lower water tray, under the moving pan and under the tool, could not find it. Also, fast/slow does not seem to be working well. Slow is very jerky, hard to align to features. From mdickey at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-11-20 10:22:30: nozzle Message-ID: <3160672.1.1353435751662.JavaMail.coral@shine> Found the nozzle hiding at Gary's desk so I reinstalled it From cbaxter at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-11-20 09:25:39: Sorry, the tip for the air gun came Message-ID: <30456965.5.1353459588022.JavaMail.coral@shine> Reset the system and moved stage at x ,y and z axis w/out problem. From eperalta at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-11-28 02:54:55: Height calibration "problem" Message-ID: <631387.29.1354100096062.JavaMail.coral@shine> Machine would not finish height calibration. It would lower the blade but would not make contact. Switched blade and problem went away. Realized it occurred because the previous blade was too short ... since the back spacer (between the blade flange and the rotor) stuck out more than the blade it could not make contact. From kokab at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: kokab at snf.stanford.edu (kokab at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-11-28 19:51:05: Coordinate not match with what we assign Message-ID: <9755974.10.1354161065523.JavaMail.coral@shine> It does not cut the wafer from the position we tell it to do. It always add an offset (6cm) to the requested position. From eperalta at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-11-28 23:58:50: Weird offset problem Message-ID: <27317520.14.1354175931588.JavaMail.coral@shine> The tool is doing that thing again where it shifts about 6mm from the desired position. i.e. You go do height calibration, point microscope to the center (0,0 position) and after hitting enter it moves the head towards positive Y values all the way to the end of the chuck and tries to do the height calibration there. This has happened before and I think it's an easy fix but sadly i forget how it was fixed... could this be added to a "troubleshooting" section in the standard operating procedure? From eperalta at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eperalta at snf.stanford.edu (eperalta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-11-29 01:09:20: System working again Message-ID: <26664574.16.1354180160527.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-11-28 19:51:05: Coordinate not match with what we assign Message-ID: <26118556.0.1354296822796.JavaMail.coral@shine> Reset the system. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-11-28 23:58:50: Weird offset problem Message-ID: <17292542.1.1354296826871.JavaMail.coral@shine> Reset the system. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-11-29 01:09:20: System working again Message-ID: <26435815.2.1354296831929.JavaMail.coral@shine> Reset the system. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-11-28 02:54:55: Height calibration "problem" Message-ID: <5686223.3.1354296843047.JavaMail.coral@shine> Reset the system. From xuanwu at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-12-01 14:15:44: fast button not working Message-ID: <12756241.32.1354400144822.JavaMail.coral@shine> More accurately, turning fast button off didn't slow down the speed of the chuck. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Shutdown wafersaw SNF 2012-12-05 17:19:55: System is not booting up Message-ID: <6292125.0.1354756796192.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Shutdown wafersaw SNF 2012-12-05 17:19:55: System is not booting up Message-ID: <11455825.33.1354822380772.JavaMail.coral@shine> Reseated the main CPU board. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-12-06 11:34:22: Fast button Update Message-ID: <18807286.34.1354822462573.JavaMail.coral@shine> The "Fast" buton intermittently works. Field service will be here mid next week. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-12-06 11:36:55: Coral/ Badger light not working Message-ID: <24785906.35.1354822616014.JavaMail.coral@shine> The Coral/ Badger light is not working properly. It does not turn green when the tool is enabled on Coral. Please go ahead and enable the tool before using the saw. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-12-06 11:36:55: Coral/ Badger light not working Message-ID: <4615216.18.1354894307351.JavaMail.coral@shine> Badger light now working. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Shutdown wafersaw SNF 2012-12-13 07:45:53: Annual PM Message-ID: <2525512.18.1355413553647.JavaMail.coral@shine> Field service is performing the annual PM, repairing the Fast switch and replacing the chuck. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Shutdown wafersaw SNF 2012-12-13 07:45:53: Annual PM Message-ID: <28507590.33.1355530546276.JavaMail.coral@shine> Completed the annual PM and replaced the wafer chuck. From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-12-06 11:34:22: Fast button Update Message-ID: <8046224.34.1355530566344.JavaMail.coral@shine> Replaced a logic board From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Problem wafersaw SNF 2012-12-01 14:15:44: fast button not working Message-ID: <27077613.35.1355530572372.JavaMail.coral@shine> Replaced a logic board From eenriquez at snf.stanford.edu Fri Jan 11 13:16:26 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:26 -0000 Subject: Comment wafersaw SNF 2012-11-20 10:22:30: nozzle Message-ID: <7003845.36.1355530584460.JavaMail.coral@shine> Replaced a logic board