Problem wafersaw SNF 2012-09-13 17:16:51: can finish Height calibration

fmwang at snf.stanford.edu fmwang at snf.stanford.edu
Fri Jan 11 13:16:26 PST 2013


I tried a couple of time for height calibration, but after more than 10 min, the calibration couldn't  finish. Blade kept  colse to the chuck, but couldn't make a contact. 



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