Vacuum problem

Dimitrios Pantelidis dpant at Stanford.EDU
Sat Feb 9 19:55:35 PST 2002


Hi all,

I was not able to use the wafersaw this evening because vacuum could 
not be applied to hold wafer on chuck. I suspect it's related to the 
electronics problems we had lately because upon hitting <LOAD> the 
red display read: "Inspecting"

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