Vacuum problem

Rostislav Vatchev Roussev rroussev at Stanford.EDU
Sun Feb 10 00:16:24 PST 2002

I had the same problem on Friday. I reported it in the coral system.

On Sat, 9 Feb 2002, Dimitrios Pantelidis wrote:

> Hi all,
> I was not able to use the wafersaw this evening because vacuum could
> not be applied to hold wafer on chuck. I suspect it's related to the
> electronics problems we had lately because upon hitting <LOAD> the
> red display read: "Inspecting"
> --

Rostislav Vatchev Roussev
Graduate Student / Research Assistant
Department of Applied Physics
316 Via Pueblo Mall
Stanford University
Stanford, CA 94305

Tel: (650) 723-1718
Fax: (650) 723-2666

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