cutting wafers with SiN membranes

Yves Acremann acremann at slac.stanford.edu
Tue Jun 29 13:45:03 PDT 2004


Hi

I need to cut a Si wafer with SiN membranes (approx. 100um in size, 
300nm thick low stress LPCVD nitride).
Does anybody have some experience in cutting a wafer with membranes 
using the saw? I know that
the saw is quite a rough machine...

Thanks
Yves





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