Wafersaw: Change of shutdown procedure

Jia Feng fengj at stanford.edu
Fri Jun 3 17:04:51 PDT 2005

Hi, wafersaw users:

I just noticed this important change of procedure on coral. I am copying it
FYI. The problem has been occurring repeatedly recently.

Change of procedure:

-- Do not press the "Emergency Stop" button when you're done with the tool.
This takes the x,y and z axis motors to their limit switches.

-- When shutting down the tool;

      - Push the "Stop" button

      - Turn off the air supply

      - Turn off the pump

      - DO NOT press the "Emergency Stop" button


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