IMPORTANT: "New" procedure at the wafersaw
Mary Tang
mtang at stanford.edu
Tue Aug 17 15:30:59 PDT 2010
Dear wafersaw users:
The water valve has been repaired!!! It has not worked properly since
January, so everyone has been manually turning the water on and off at
the flow meter.
NO LONGER! The automatic water valve now works! So, the "New"
procedures (actually, the old one, pre-January):
1. Make sure the flow meter is ON. The knob should be open, about 1/4
- 1/2 turn counter clockwise from fully closed. Make sure to check this
-- if the water is not on when you cut, you are cutting dry and the
blade or your wafer will break.
2. Water flow can be adjusted only while cutting (using the flow meter
knob.) The flow should be around 10 but probably no more than 15, from
the top of the float.
3. DO NOT turn the flow meter knob to the off position. It could mess
up the next person.
Any problems, please report on Coral.
Thanks!
Team Etch
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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