From lindaw at snf.stanford.edu Wed Feb 7 06:54:34 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Feb 7, 2001 6:54:34 AM Subject: Problem wbdiff 2001-02-07 06:54:33: N2 gun leaking at hose connection to gun Message-ID: From seymour at snf.stanford.edu Wed Feb 7 02:18:21 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Feb 7, 2001 2:18:21 PM Subject: Problem wbdiff 2001-02-07 06:54:33: N2 gun leaking at hose connection to gun Message-ID: N2 line was split. removed bad section of line and reinstalled From king at snf.stanford.edu Mon Feb 12 10:48:32 2001 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Feb 12, 2001 10:48:32 AM Subject: Problem wbdiff 2001-02-12 10:48:31: possible spin dryer problem Message-ID: I have seen problems on two different lab users' wafers in the last few days: They have large spots (1 cm or more) of thicker oxide, as if they went into the furnace with water droplets. You should always check that your wafers have dried completely since some lab users have been reducing the spin dry time (don't do this!). Or, maybe the heater is off, or it's happening in the furnace. Since I didn't process these wafers/don't know their history, this is FYI only. From april at snf.stanford.edu Tue Feb 13 09:33:04 2001 From: april at snf.stanford.edu (april at snf.stanford.edu) Date: Feb 13, 2001 9:33:04 AM Subject: Comment wbdiff 2001-02-13 09:33:03: wbdiff Message-ID: After I changed the H20:H2O2:HCl bath, it drained out even though the aspirator was not on.