Problem wbdiff 2001-02-12 10:48:31: possible spin dryer problem

king at snf.stanford.edu king at snf.stanford.edu
Mon Feb 12 10:48:32 PST 2001


I have seen problems on two different lab users' wafers in the last few days:  They have large spots (1 cm or more) of thicker oxide, as if they went into the furnace with water droplets.  You should always check that your wafers have dried completely since some lab users have been reducing the spin dry time (don't do this!).   Or, maybe the heater is off, or it's happening in the furnace.  Since I didn't process these wafers/don't know their history, this is FYI only.




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