From grupp at snf.stanford.edu Sat Mar 3 09:25:08 2001 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Mar 3, 2001 9:25:08 PM Subject: Problem wbdiff 2001-03-03 21:25:07: HCl thermometer reading wrong Message-ID: It either reads 8 or jumps to 345! -Dan From grupp at snf.stanford.edu Sat Mar 3 09:25:37 2001 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Mar 3, 2001 9:25:37 PM Subject: Problem wbdiff 2001-03-03 21:25:36: Sulfuric drain very slow Message-ID: From latta at snf.stanford.edu Mon Mar 5 09:12:58 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mar 5, 2001 9:12:58 AM Subject: Problem wbdiff 2001-03-05 09:12:56: Sulfuric bath won't drain Message-ID: This is going to be a larger problem as the chemical ages and needs to be changed. It should be changed 3/8. From april at snf.stanford.edu Tue Mar 6 07:42:59 2001 From: april at snf.stanford.edu (april at snf.stanford.edu) Date: Mar 6, 2001 7:42:59 AM Subject: Comment wbdiff 2001-03-06 07:42:58: sulfuric bath Message-ID: sulfuric bath still drains VERY SLOWLY! From seymour at snf.stanford.edu Tue Mar 6 09:16:40 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mar 6, 2001 9:16:40 AM Subject: Shutdown wbdiff 2001-03-06 09:16:39: need to check drain for sulfuric Message-ID: From jhaydon at snf.stanford.edu Tue Mar 6 02:10:08 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mar 6, 2001 2:10:08 PM Subject: Shutdown wbdiff 2001-03-06 09:16:39: sulfuric acid drain Message-ID: The aspirator tube on the sulfuric acid bath had an air leak. It appears to be fixed it now has about the same drain down time as the one next to it when using DI water. From jhaydon at snf.stanford.edu Tue Mar 6 02:11:39 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mar 6, 2001 2:11:39 PM Subject: Problem wbdiff 2001-03-03 21:25:36: Sulfuric drain very slow Message-ID: The drain seams to be fixed From jhaydon at snf.stanford.edu Tue Mar 6 02:12:15 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mar 6, 2001 2:12:15 PM Subject: Problem wbdiff 2001-03-05 09:12:56: Sulfuric bath won't drain Message-ID: Drain seams to be fixed From crichter at snf.stanford.edu Wed Mar 7 10:58:23 2001 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mar 7, 2001 10:58:23 AM Subject: Problem wbdiff 2001-03-07 10:58:22: Dump rinser is slow Message-ID: The dump rinser located next to the BOE etch tank is going about two cycles slower. From jhaydon at snf.stanford.edu Fri Mar 9 08:21:56 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mar 9, 2001 8:21:56 AM Subject: Problem wbdiff 2001-03-07 10:58:22: Dump rinser Message-ID: Had leak in suction line. We fixed air leak and tested the unit with DI water and it had about the same dain down time as the one next to it. From jhaydon at snf.stanford.edu Fri Mar 9 08:26:54 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mar 9, 2001 8:26:54 AM Subject: Problem wbdiff 2001-03-03 21:25:07: HCl thermometer reading wrong Message-ID: I have not seen a problem as yet with the thermometer but will keep an eye on it. In the mean time it would help me if when seeing a problem more information discribing it would be helpful. From jhaydon at snf.stanford.edu Fri Mar 9 08:32:49 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mar 9, 2001 8:32:49 AM Subject: Problem wbdiff 2001-02-12 10:48:31: possible spin dryer problem Message-ID: Spin dryer seems to be working ok at this time. From mtang at snf.stanford.edu Mon Mar 19 15:04:26 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 19 Mar 2001 15:04:26 -0800 Subject: Contamination incident Message-ID: <3AB6907A.F4F42732@snf.stanford.edu> Dear wbdiff users -- There was an incident this morning where wafers containing silicides and photoresist were inadvertently cleaned at wbdiff instead of wbsilicide. The person responsible immediately recognized the mistake, took responsibility, and is now decontaminating the bench under the supervision of staff members. We will be considering retraining on both stations. Because of the open-ended nature of doing research it is impossible to put in fool-proof measures to prevent this kind of incident from recurring. And mistakes happen. Instead, we ask that everyone be very careful about their processing and respond quickly to mistakes and accidents. We are all part of the community: labmembers who act conscientiously will always be welcome here. New qualification procedures will be in effect at these stations: wbnonmetal, wbdiff, and wbsilicide. Qualification procedures will be more standardized and consist of demonstration of knowledge and a written test. New operating procedures for these stations will be posted in the next day or two. -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From EvelynHug at aol.com Mon Mar 19 16:04:49 2001 From: EvelynHug at aol.com (EvelynHug at aol.com) Date: Mon, 19 Mar 2001 19:04:49 EST Subject: Contamination incident Message-ID: I don't know if wbdiff users who were going to use the bench for their process got my message I sent earlier on "pine".....if not I want to apoligize for hanging everyone's process up today.....I know how upsetting that is.....I feel like sticking my head in the ground and hiding (this is so embarrassing.......I sooooo sorry!)