From seymour at snf.stanford.edu Tue May 8 11:41:34 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2001 11:41:34 AM Subject: Problem wbdiff 2001-04-24 10:11:10: wbdiff Message-ID: don't know what the problem From seymour at snf.stanford.edu Tue May 8 11:42:15 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2001 11:42:15 AM Subject: Problem wbdiff 2001-04-16 17:06:55: diwater meg ohm error Message-ID: spindryer works as it should From seymour at snf.stanford.edu Tue May 8 11:42:31 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2001 11:42:31 AM Subject: Problem wbdiff 2001-04-16 11:26:52: Message-ID: no problem indicated From seymour at snf.stanford.edu Tue May 8 11:43:29 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: May 8, 2001 11:43:29 AM Subject: Problem wbdiff 2001-04-10 16:24:50: Message-ID: spin dryer needs to be set for a longer dry time From rohits at snf.stanford.edu Tue May 29 12:23:37 2001 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: May 29, 2001 12:23:37 AM Subject: Problem wbdiff 2001-05-29 00:23:36: DI resistivity maxes out at 4Mohm-cm Message-ID: This is even after changing all chemicals From greene at snf.stanford.edu Tue May 29 03:27:43 2001 From: greene at snf.stanford.edu (greene at snf.stanford.edu) Date: May 29, 2001 3:27:43 PM Subject: Shutdown wbdiff 2001-05-29 15:27:43: spin dryer not working properly Message-ID: The maximum resistivity of the spin dryer is ~4 MOhm*cm. Jim is looking into the cause. From cbaxter at snf.stanford.edu Tue May 29 09:08:55 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 29, 2001 9:08:55 PM Subject: Problem wbdiff 2001-05-29 00:23:36: DI resistivity maxes out at 4Mohm-cm Message-ID: cleaned chamber with h2o2 using squirk bottle. now di resistivity is up to 14meg ohm. rinse chamber with di for 15mins... From cbaxter at snf.stanford.edu Tue May 29 09:09:38 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 29, 2001 9:09:38 PM Subject: Shutdown wbdiff 2001-05-29 15:27:43: spin dryer not working properly Message-ID: spin dryer resistivity is back to normal From kjliu at snf.stanford.edu Wed May 30 04:21:43 2001 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: May 30, 2001 4:21:43 PM Subject: Problem wbdiff 2001-05-30 16:21:41: heater not working Message-ID: heater on sulfuric bath not working From cbaxter at snf.stanford.edu Wed May 30 04:46:12 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 30, 2001 4:46:12 PM Subject: Problem wbdiff 2001-05-30 16:21:41: heater not working Message-ID: reseated tc on controller From beckwith at snf.stanford.edu Thu May 31 12:24:41 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: May 31, 2001 12:24:41 PM Subject: Problem wbdiff 2001-05-31 12:24:38: SRD still not meeting Rs requirements Message-ID: I ran an empty cassette for 45-60 min. after it timed out, Rs never reached more than 13.5. Immediately after the empty cassette was removed, I left my wafers in the SRD for 5 minutes after the timer timed out, Rs was 11.0 when I removed my wafers. There is still a problem here.