Problem wbdiff 2001-05-29 00:23:36: DI resistivity maxes out at 4Mohm-cm

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue May 29 09:08:55 PDT 2001


cleaned chamber  with h2o2  using squirk bottle.  now
di resistivity is up to 14meg ohm. rinse chamber with di
for 15mins...




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