Problem wbdiff 2001-05-31 12:24:38: SRD still not meeting Rs requirements

beckwith at snf.stanford.edu beckwith at snf.stanford.edu
Thu May 31 12:24:41 PDT 2001


I ran an empty cassette for 45-60 min. after it timed out, Rs
never reached more than 13.5. Immediately after the empty cassette was removed,  I left my wafers in the SRD for
5 minutes after the timer timed out, Rs  was 11.0 when I 
removed my wafers. There is still a problem here.




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