From hector at snf.stanford.edu  Tue Apr  9 12:25:16 2002
From: hector at snf.stanford.edu (hector at snf.stanford.edu)
Date: Apr 9, 2002 12:25:16 AM
Subject: Shutdown wbdiff 2002-04-09 00:25:16: HCl pot doesn't drain
Message-ID: <mailman.132.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From gladys at snf.stanford.edu  Tue Apr  9 10:33:45 2002
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Apr 9, 2002 10:33:45 AM
Subject: Shutdown wbdiff 2002-04-09 00:25:16: HCl pot doesn't drain.......Mike fixed it 4/9/2
Message-ID: <mailman.133.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From crichter at snf.stanford.edu  Fri Apr 19 09:26:43 2002
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Apr 19, 2002 9:26:43 AM
Subject: Problem wbdiff 2002-04-19 09:26:43: HCl drain not working
Message-ID: <mailman.134.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

HCl/H2H2/H2 drain not aspirating



From jhaydon at snf.stanford.edu  Fri Apr 19 11:20:06 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 19, 2002 11:20:06 AM
Subject: Problem wbdiff 2002-04-19 09:26:43: HCl drain not working
Message-ID: <mailman.135.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

drain fixed ok to use



From kailash at snf.stanford.edu  Sun Apr 21 06:33:34 2002
From: kailash at snf.stanford.edu (kailash at snf.stanford.edu)
Date: Apr 21, 2002 6:33:34 PM
Subject: Problem wbdiff 2002-04-21 18:33:33: Resistivity Monitor not working
Message-ID: <mailman.136.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

Hi,
      I found that the resistivity monitor is not working on wbdiff. Eric inspected it and found wafer pieces behind wbdiff (not mine). 
      Thanks
       - Kailash



From ericp at snf.stanford.edu  Sun Apr 21 06:53:15 2002
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Apr 21, 2002 6:53:15 PM
Subject: Problem wbdiff 2002-04-21 18:53:15: SRD ohms ok
Message-ID: <mailman.137.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

Cleared the broken wafer from the resistivity monitor-
Reading fine now, straight up to 16Mohm and above.



From jhaydon at snf.stanford.edu  Mon Apr 22 04:02:35 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 22, 2002 4:02:35 PM
Subject: Problem wbdiff 2002-04-21 18:53:15: SRD ohms ok
Message-ID: <mailman.138.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

srd ok



From jhaydon at snf.stanford.edu  Mon Apr 22 04:02:50 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 22, 2002 4:02:50 PM
Subject: Problem wbdiff 2002-04-21 18:33:33: Resistivity Monitor not working
Message-ID: <mailman.139.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

srd ok



From jhaydon at snf.stanford.edu  Tue Apr 23 04:00:26 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 23, 2002 4:00:26 PM
Subject: Problem wbdiff 2002-03-28 12:33:32: Spindryer; teflon brace grabs wafers
Message-ID: <mailman.140.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

burr on rail has been removed should not grab wafers any more