From amol at snf.stanford.edu  Thu Feb 14 11:37:28 2002
From: amol at snf.stanford.edu (amol at snf.stanford.edu)
Date: Feb 14, 2002 11:37:28 PM
Subject: Shutdown wbdiff 2002-02-14 23:37:27: metal contamination
Message-ID: <mailman.125.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

Metal contaminated tweezers were used to transfer wafers. The wafers didn't have any metal prior to that. I will decontaminate the bench Friday morning.



From gladys at snf.stanford.edu  Fri Feb 15 10:00:12 2002
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Feb 15, 2002 10:00:12 AM
Subject: Shutdown wbdiff 2002-02-14 23:37:27: metal contamination...Amol had de contaminated the wbdiff.
Message-ID: <mailman.126.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From gladys at snf.stanford.edu  Fri Feb 15 10:30:38 2002
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Feb 15, 2002 10:30:38 AM
Subject: Shutdown wbdiff 2002-02-15 10:30:37: shutdown for another decontamination
Message-ID: <mailman.127.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Fri Feb 15 01:22:32 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Feb 15, 2002 1:22:32 PM
Subject: Shutdown wbdiff 2002-02-15 10:30:37: Decontamination Done
Message-ID: <mailman.128.1357939016.26032.wbdiff-pcs@snf.stanford.edu>