Problem wbdiff 2003-04-24 02:04:39: Report Clear for wbdiff

jhaydon at snf.stanford.edu jhaydon at snf.stanford.edu
Thu Apr 24 07:26:02 PDT 2003


the SRD works. It will not go to rinse until it has reached set point and the time has run out. If it has not reached set point it will contiue to rinse until it does and it will flash 999. If it has n ot reached set point it is most likely because your wafer are still dirty.




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