From rcrane at snf.stanford.edu  Thu Jan  2 03:46:52 2003
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Jan 2, 2003 3:46:52 PM
Subject: Problem wbdiff 2003-01-02 15:46:51: needs decontamination
Message-ID: <mailman.173.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From gladys at snf.stanford.edu  Fri Jan  3 10:23:54 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Jan 3, 2003 10:23:54 AM
Subject: Problem wbdiff 2003-01-02 15:46:51: needs decontamination : done
Message-ID: <mailman.174.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From maurice at snf.stanford.edu  Wed Jan 15 11:17:04 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Jan 15, 2003 11:17:04 AM
Subject: Shutdown wbdiff 2003-01-15 11:17:03: acid leak in drain
Message-ID: <mailman.175.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Jan 15 11:46:46 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jan 15, 2003 11:46:46 AM
Subject: Shutdown wbdiff 2003-01-15 11:17:03: acid leak in drain
Message-ID: <mailman.176.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

ok to use



From quickwin at snf.stanford.edu  Wed Jan 15 05:40:10 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Jan 15, 2003 5:40:10 PM
Subject: Problem wbdiff 2003-01-15 17:40:09: one bad wafer cassette
Message-ID: <mailman.177.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

There is a bad wafer cassette which does not meet 16 MOhm-Cm resistivity requirement without any wafer inside and after being in the dryer for 30 minutes. It is placed above the wet bench with a note taped to it.



From jhaydon at snf.stanford.edu  Fri Jan 17 06:59:58 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jan 17, 2003 6:59:58 AM
Subject: Problem wbdiff 2003-01-15 17:40:09: one bad wafer cassette
Message-ID: <mailman.178.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

problem taken has been taken care of



From auber at snf.stanford.edu  Thu Jan 23 11:10:49 2003
From: auber at snf.stanford.edu (auber at snf.stanford.edu)
Date: Jan 23, 2003 11:10:49 AM
Subject: Problem wbdiff 2003-01-23 11:10:48: sulf hotpot timer and temp readout down
Message-ID: <mailman.179.1357939016.26032.wbdiff-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Thu Jan 23 11:41:25 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jan 23, 2003 11:41:25 AM
Subject: Problem wbdiff 2003-01-23 11:10:48: sulf hotpot timer and temp readout down
Message-ID: <mailman.180.1357939016.26032.wbdiff-pcs@snf.stanford.edu>

possible bad electrical connection ok to use