From jgarate at snf.stanford.edu  Tue Jan 11 09:52:55 2005
From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu)
Date: Tue, 11 Jan 2005 09:52:55 -0800
Subject: Problem wbdiff SNF 2005-01-11 09:52:55: Heater for the HCL tank on the wdiff wet bench doesn't work.
Message-ID: <mailman.281.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

Heater does not come on.



From anayfeh at snf.stanford.edu  Tue Jan 11 11:15:27 2005
From: anayfeh at snf.stanford.edu (anayfeh at snf.stanford.edu)
Date: Tue, 11 Jan 2005 11:15:27 -0800
Subject: Problem wbdiff SNF 2005-01-11 11:15:27: SPIN DRY WIILL NOT START 
Message-ID: <mailman.282.1357939017.26032.wbdiff-pcs@snf.stanford.edu>




From fengj at snf.stanford.edu  Tue Jan 11 23:05:59 2005
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Tue, 11 Jan 2005 23:05:59 -0800
Subject: Problem wbdiff SNF 2005-01-11 23:05:59: Photolithography Teflon Cassette Was Found Here
Message-ID: <mailman.283.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

With brown button, on top of wbdiff.



From fengj at snf.stanford.edu  Wed Jan 12 23:44:07 2005
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Wed, 12 Jan 2005 23:44:07 -0800
Subject: Problem wbdiff SNF 2005-01-12 23:44:07: Water still on wafers after spin-dry
Message-ID: <mailman.284.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

Tried twice, but still found water on wafer. Then set the rinse time to 0, and wafers looked dry. But the rinse time cannot be increased any more than 110.



From jhaydon at snf.stanford.edu  Wed Jan 19 08:22:19 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 19 Jan 2005 08:22:19 -0800
Subject: Problem wbdiff SNF 2005-01-11 09:52:55: Heater for the HCL tank on the wdiff wet bench doesn't work.
Message-ID: <mailman.285.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

working now



From jhaydon at snf.stanford.edu  Wed Jan 19 08:22:43 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 19 Jan 2005 08:22:43 -0800
Subject: Problem wbdiff SNF 2005-01-11 11:15:27: SPIN DRY WIILL NOT START 
Message-ID: <mailman.286.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

working



From jhaydon at snf.stanford.edu  Wed Jan 19 08:24:01 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 19 Jan 2005 08:24:01 -0800
Subject: Problem wbdiff SNF 2005-01-12 23:44:07: Water still on wafers after spin-dry
Message-ID: <mailman.287.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

increased drying tome by 60 sec



From jhaydon at snf.stanford.edu  Wed Jan 19 09:22:43 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 19 Jan 2005 09:22:43 -0800
Subject: Problem wbdiff SNF 2005-01-11 23:05:59: Photolithography Teflon Cassette Was Found Here
Message-ID: <mailman.288.1357939017.26032.wbdiff-pcs@snf.stanford.edu>




From lindaw at snf.stanford.edu  Thu Jan 20 09:15:47 2005
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 20 Jan 2005 09:15:47 -0800
Subject: Shutdown wbdiff SNF 2005-01-20 09:15:47: Sulfuric bath contaminated with Etch boat
Message-ID: <mailman.289.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

User will clean and decontaminate as per instructions from Gladys.



From gladys at snf.stanford.edu  Thu Jan 20 09:49:32 2005
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Thu, 20 Jan 2005 09:49:32 -0800
Subject: Shutdown wbdiff SNF 2005-01-20 09:15:47: Sulfuric bath contaminated with Etch boat
Message-ID: <mailman.290.1357939017.26032.wbdiff-pcs@snf.stanford.edu>

de contaminated