Problem wbdiff SNF 2006-05-27 21:24:31: Temp setting way off
shott at snf.stanford.edu
shott at snf.stanford.edu
Sun May 28 09:52:32 PDT 2006
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Problem wbdiff SNF 2006-05-27 21:24:31: Temp setting way off
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Shutdown wbdiff SNF 2006-05-30 14:54:05: put PR wafers into sulfuric
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Reset H2SO4/H2O2 hotpot to 90C and HCl/H2O2 to 70C.
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Problem wbdiff SNF 2006-05-27 21:24:31: Temp setting way off
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Shutdown wbdiff SNF 2006-05-30 14:54:05: put PR wafers into sulfuric
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