Problem wbdiff SNF 2007-03-20 22:10:36: Rinser Dryer keeps rinsing

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed May 2 07:58:28 PDT 2007


spin rinser dryer is in manual mode for now it does not reach set point of 16 megohms. I believe the source of the problem is dowm stream of the chamber and should not affect your wafers.




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