From rik at snf.stanford.edu Fri May 2 09:17:10 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 2 May 2008 09:17:10 -0700 Subject: Comment wbdiff SNF 2008-05-02 09:17:09: Only 3 diff cassettes Message-ID: I thought there used to be more than 3 available. Last 2 days, I've had to forgo my reservations because I could not find a cassette to start the clean. From rik at snf.stanford.edu Fri May 2 09:23:14 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 2 May 2008 09:23:14 -0700 Subject: Comment wbdiff SNF 2008-05-02 09:23:13: Ignore last comment Message-ID: Seems ppl don't always return the cassettes back to the station. Found 5. From king at snf.stanford.edu Wed May 7 15:03:01 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 7 May 2008 15:03:01 -0700 Subject: Problem wbdiff SNF 2008-05-07 15:03:01: Chemical smell by diff, silicide Message-ID: I poured DI into the diff, silicide and GaAs area traps and logged it to help track it down. It seems to be coming back about every two weeks or so. From jhaydon at snf.stanford.edu Thu May 8 07:31:55 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 8 May 2008 07:31:55 -0700 Subject: Problem wbdiff SNF 2008-05-07 15:03:01: Chemical smell by diff, silicide Message-ID: can not detect any chemical smell From masaharu at snf.stanford.edu Thu May 8 21:40:18 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Thu, 8 May 2008 21:40:18 -0700 Subject: Problem wbdiff SNF 2008-05-08 21:40:17: resistivity meter not functional Message-ID: Resistivity meter seems not work now. I tried 5times, however, resistivity cannot reach the setpoint. From jhaydon at snf.stanford.edu Fri May 9 08:30:02 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 9 May 2008 08:30:02 -0700 Subject: Problem wbdiff SNF 2008-05-08 21:40:17: resistivity meter not functional Message-ID: no set point has been set for the resistivity meter From rwoo at snf.stanford.edu Fri May 16 18:57:28 2008 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Fri, 16 May 2008 18:57:28 -0700 Subject: Problem wbdiff SNF 2008-05-16 18:57:27: spin dryer resistivity meter Message-ID: The spin dryer is consistently showing really low resistivity - with new test wafers was showing only 5 after full 200s rinse cycle. Maybe wafer pieces stuck in the drain? From jhaydon at snf.stanford.edu Mon May 19 08:25:30 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 19 May 2008 08:25:30 -0700 Subject: Problem wbdiff SNF 2008-05-16 18:57:27: spin dryer resistivity meter Message-ID: I ran SRD several times was able to get to 16 megohms. I later cleaned sensor cavity and ran it some more was able to get to 16.9 megohms. The door may not have been sealed properly or casset may have been dirty.