From narii at snf.stanford.edu Sat Aug 1 14:49:23 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 1 Aug 2009 14:49:23 -0700 Subject: Problem wbdiff SNF 2009-08-01 14:49:23: Unable to drain Hcl bath Message-ID: Aspirator seems not working on Hcl bath. Unable to drain it even if the temperature is quite low. From sishikaw at snf.stanford.edu Sun Aug 2 13:10:09 2009 From: sishikaw at snf.stanford.edu (sishikaw at snf.stanford.edu) Date: Sun, 2 Aug 2009 13:10:09 -0700 Subject: Problem wbdiff SNF 2009-08-02 13:10:09: teflon dip-stick Message-ID: the teflon dip-stick has been in the HPM tank. From jhaydon at snf.stanford.edu Mon Aug 3 07:46:45 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 3 Aug 2009 07:46:45 -0700 Subject: Problem wbdiff SNF 2009-08-02 13:10:09: teflon dip-stick Message-ID: re-installed dip-stick From jhaydon at snf.stanford.edu Mon Aug 3 07:47:09 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 3 Aug 2009 07:47:09 -0700 Subject: Problem wbdiff SNF 2009-08-01 14:49:23: Unable to drain Hcl bath Message-ID: replaced water valve From uli at snf.stanford.edu Thu Aug 6 13:32:31 2009 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 6 Aug 2009 13:32:31 -0700 Subject: Problem wbdiff SNF 2009-07-24 10:33:44: 5:1:1 Level Sensor Error Message-ID: fixed From fanpy at snf.stanford.edu Mon Aug 10 16:11:21 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Mon, 10 Aug 2009 16:11:21 -0700 Subject: Comment wbdiff SNF 2009-08-10 16:11:20: Wrong cassette in diff box Message-ID: I found a cassette with light yellow button (which should belong to an "etch" box) in one of the diffusion boxes. From gth at snf.stanford.edu Thu Aug 13 18:05:09 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 13 Aug 2009 18:05:09 -0700 Subject: Problem wbdiff SNF 2009-08-13 18:05:09: wbdiff cassettes missing ? Message-ID: 2 cassettes are placed near the epi2. They are labelled as "dirty". From latta at snf.stanford.edu Wed Aug 19 11:18:49 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Aug 2009 11:18:49 -0700 Subject: Problem wbdiff SNF 2009-08-13 18:05:09: wbdiff cassettes missing ? Message-ID: Actually, there are now three cassettes to be cleaned. There are also plenty of cassettes at the bench for use. Please don't write tis up as a problem unless there is a shortage of usable cassettes. A comment is fine. Thanks. From chienyuc at snf.stanford.edu Fri Aug 21 11:10:31 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Fri, 21 Aug 2009 11:10:31 -0700 Subject: Comment wbdiff SNF 2009-08-21 11:10:30: somebody left his wafers in the dump rinser Message-ID: In the second bath From rik at snf.stanford.edu Fri Aug 21 18:28:16 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 21 Aug 2009 18:28:16 -0700 Subject: Problem wbdiff SNF 2009-08-21 18:28:16: Spin rinser leaving droplets Message-ID: Tried to dry wafers 3 times. The spin rinser is leaving droplets on the surface. The dry time is set to the default value of 240secs and the wafers are bare silicon. From rik at snf.stanford.edu Fri Aug 21 23:47:32 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 21 Aug 2009 23:47:32 -0700 Subject: Comment wbdiff SNF 2009-08-21 23:47:31: Wafers left in a Diff cassette Message-ID: Someone left 5-6 wafers in a diff cassette. They have been in a box since atleast 6 pm on Friday. Please reclaim them if they are yours. Thx. From pponce at snf.stanford.edu Mon Aug 24 22:21:55 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Mon, 24 Aug 2009 22:21:55 -0700 Subject: Comment wbdiff SNF 2009-08-24 22:21:54: spin dryer rho monitor off Message-ID: The resistivity meter in the diff spin dryer seems to be disabled. Is this normal? From jhaydon at snf.stanford.edu Thu Aug 27 13:56:02 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 27 Aug 2009 13:56:02 -0700 Subject: Problem wbdiff SNF 2009-08-21 18:28:16: Spin rinser leaving droplets Message-ID: have not heard any new reports of this problem. It is possible RPM were not set correctly From ywidjaja at snf.stanford.edu Fri Aug 28 04:52:16 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Fri, 28 Aug 2009 04:52:16 -0700 Subject: Problem wbdiff SNF 2009-08-28 04:52:15: droplets still seen Message-ID: Same issue reported by previous user: droplets still seen coming out of SRD.