Problem wbdiff SNF 2009-08-21 18:28:16: Spin rinser leaving droplets

rik at snf.stanford.edu rik at snf.stanford.edu
Fri Aug 21 18:28:16 PDT 2009

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Tried to dry wafers 3 times. The spin rinser is leaving droplets on the surface. The dry time is set to the default value of 240secs and the wafers are bare silicon.

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