Problem wbdiff SNF 2009-08-21 18:28:16: Spin rinser leaving droplets

rik at snf.stanford.edu rik at snf.stanford.edu
Fri Aug 21 18:28:16 PDT 2009


Tried to dry wafers 3 times. The spin rinser is leaving droplets on the surface. The dry time is set to the default value of 240secs and the wafers are bare silicon. 




More information about the wbdiff-pcs mailing list