From yeh at snf.stanford.edu Mon Mar 2 17:35:23 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 2 Mar 2009 17:35:23 -0800 Subject: Problem wbdiff SNF 2009-03-02 17:35:23: srd sometimes not drying wafers Message-ID: ran two full boats of 4" wafers through SRD. one of two boats came out dripping wet. ran that boat a second time with better results but still some small droplets of water can be seen in most wafers. rinse = 200sec, dry = 270sec. From latta at snf.stanford.edu Tue Mar 3 10:30:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 3 Mar 2009 10:30:58 -0800 Subject: Comment wbdiff SNF 2009-03-03 10:30:58: turned rpm for dry cycle on SRD Message-ID: max is 2200-2300rpm. Is that what it should be? From damodei at snf.stanford.edu Wed Mar 4 17:30:54 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Wed, 4 Mar 2009 17:30:54 -0800 Subject: Problem wbdiff SNF 2009-03-04 17:30:54: SRD sometimes doesn't advance to dry stage Message-ID: Sometimes the SRD will rinse indefinitely and won't advance to the dry stage. The rinse time counts down normally, but then the controller displays "999" and continues to rinse forever unless the stop button is pressed. From jhaydon at snf.stanford.edu Thu Mar 5 06:29:48 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 5 Mar 2009 06:29:48 -0800 Subject: Problem wbdiff SNF 2009-03-04 17:30:54: SRD sometimes doesn't advance to dry stage Message-ID: when in auto mode the SRD will rinse to set point it will flash 999 until it reaches it if the time has been exceeded. In manual mode it will rinse by time From jhaydon at snf.stanford.edu Thu Mar 5 06:31:01 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 5 Mar 2009 06:31:01 -0800 Subject: Problem wbdiff SNF 2009-03-02 17:35:23: srd sometimes not drying wafers Message-ID: if the dry speed was set to low it will not dry correctly From yeh at snf.stanford.edu Wed Mar 11 09:41:52 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 11 Mar 2009 09:41:52 -0700 Subject: Comment wbdiff SNF 2009-03-11 09:41:51: found fluorine crystals Message-ID: around 6:1 BHF tank. cleaned it up. From mcherry at snf.stanford.edu Thu Mar 12 11:29:17 2009 From: mcherry at snf.stanford.edu (mcherry at snf.stanford.edu) Date: Thu, 12 Mar 2009 11:29:17 -0700 Subject: Problem wbdiff SNF 2009-03-12 11:29:17: 5:1:1 Low Liq Sensor Message-ID: Sensor seems to be malfunctioning, reporting low level (when it's full) . Heater interlock working (won't heat with low level warning). From yeh at snf.stanford.edu Fri Mar 13 10:26:29 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 13 Mar 2009 10:26:29 -0700 Subject: Comment wbdiff SNF 2009-03-13 10:26:29: fluorine crystals Message-ID: found on lid and lip of 6:1 BHF tank. cleaned it up. From jhaydon at snf.stanford.edu Sat Mar 14 17:55:23 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sat, 14 Mar 2009 17:55:23 -0700 Subject: Problem wbdiff SNF 2009-03-12 11:29:17: 5:1:1 Low Liq Sensor Message-ID: I don't think the bench was enabled From jwpchen at snf.stanford.edu Sat Mar 14 23:51:27 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sat, 14 Mar 2009 23:51:27 -0700 Subject: Problem wbdiff SNF 2009-03-14 23:51:27: 5:1:1 Low Liq Sensor Message-ID: while running other parts of the bench, HCI/H2O2 buzzed level low and turned off heater. liq level indictator cycles between off and on once in a while. Bench is enabled, proof is that piranha bath heater stays on. bizarre. From maurice at snf.stanford.edu Thu Mar 19 10:33:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 Mar 2009 10:33:11 -0700 Subject: Problem wbdiff SNF 2009-03-19 10:33:11: spin dryer time stuck at 660 Message-ID: someone changed the time...it is now stuck at 660second (should be 240). From elvislin at snf.stanford.edu Thu Mar 19 16:00:24 2009 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Thu, 19 Mar 2009 16:00:24 -0700 Subject: Problem wbdiff SNF 2009-03-19 16:00:23: change it back to the default Message-ID: From jhaydon at snf.stanford.edu Fri Mar 20 10:16:06 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 20 Mar 2009 10:16:06 -0700 Subject: Problem wbdiff SNF 2009-03-19 16:00:23: change it back to the default Message-ID: SRD controller now set at 200 seconds it should not be changed From jhaydon at snf.stanford.edu Fri Mar 20 10:16:42 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 20 Mar 2009 10:16:42 -0700 Subject: Problem wbdiff SNF 2009-03-19 10:33:11: spin dryer time stuck at 660 Message-ID: SRD now set at 200 seconds it should not be changed From jhaydon at snf.stanford.edu Fri Mar 20 10:20:15 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 20 Mar 2009 10:20:15 -0700 Subject: Problem wbdiff SNF 2009-03-14 23:51:27: 5:1:1 Low Liq Sensor Message-ID: new level switch installed From masaharu at snf.stanford.edu Sun Mar 22 15:19:40 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 22 Mar 2009 15:19:40 -0700 Subject: Problem wbdiff SNF 2009-03-22 15:19:40: wafers spin forever Message-ID: Spin dryer didn't stop and rotated forever. The display didn't show the right time left. From maurice at snf.stanford.edu Mon Mar 23 14:20:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:20:23 -0700 Subject: Problem wbdiff SNF 2009-03-23 14:20:22: HCl bath leaking slowly Message-ID: User reports that the HCl bath liquid level is dropping below "Low Level" after an hour or so.