Problem wbdiff SNF 2009-03-02 17:35:23: srd sometimes not drying wafers

yeh at snf.stanford.edu yeh at snf.stanford.edu
Mon Mar 2 17:35:23 PST 2009


ran two full boats of 4" wafers through SRD.  one of two boats came out dripping wet.  ran that boat a second time with better results but still some small droplets of water can be seen in  most wafers.  rinse = 200sec, dry = 270sec.




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