From filip at snf.stanford.edu Sun Oct 4 15:28:54 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sun, 4 Oct 2009 15:28:54 -0700 Subject: Comment wbdiff SNF 2009-10-04 15:28:53: many crystals around 6:1 BOE Message-ID: rinsed and dried the area From cmcg at snf.stanford.edu Thu Oct 8 10:34:34 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 8 Oct 2009 10:34:34 -0700 Subject: Problem wbdiff SNF 2009-10-08 10:34:34: SRD resistivity meter Message-ID: found SRD in manual mode. Switched to auto and resistivity meter gave Err messege. switched back to manual From jhaydon at snf.stanford.edu Fri Oct 9 08:45:31 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 9 Oct 2009 08:45:31 -0700 Subject: Problem wbdiff SNF 2009-10-08 10:34:34: SRD resistivity meter Message-ID: if the SRD is not running then it is normal for the meter to display Err From rostam at snf.stanford.edu Tue Oct 20 14:30:53 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 20 Oct 2009 14:30:53 -0700 Subject: Problem wbdiff SNF 2009-10-20 14:30:53: srd problem going to drying step Message-ID: The spin-rinse-dryer reading was showing 11 and its setpoint was 16. The spin-rinse-dryer continued rinsing my wafers for >10 min extra before going to drying step. From nvgirish at snf.stanford.edu Tue Oct 20 15:58:42 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Tue, 20 Oct 2009 15:58:42 -0700 Subject: Problem wbdiff SNF 2009-10-20 15:58:41: Water dripping behind the SRD Message-ID: The water pipe during the rinse cycle drips creating the puddle. From latta at snf.stanford.edu Tue Oct 20 17:25:44 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:25:44 -0700 Subject: Comment wbdiff SNF 2009-08-10 16:11:20: Wrong cassette in diff box Message-ID: fixed From latta at snf.stanford.edu Tue Oct 20 17:26:01 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:26:01 -0700 Subject: Comment wbdiff SNF 2009-08-21 11:10:30: somebody left his wafers in the dump rinser Message-ID: taken out From latta at snf.stanford.edu Tue Oct 20 17:26:25 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:26:25 -0700 Subject: Comment wbdiff SNF 2009-08-21 23:47:31: Wafers left in a Diff cassette Message-ID: taken care of From latta at snf.stanford.edu Tue Oct 20 17:26:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:26:58 -0700 Subject: Comment wbdiff SNF 2009-08-24 22:21:54: spin dryer rho monitor off Message-ID: it is connected now From latta at snf.stanford.edu Tue Oct 20 17:27:22 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:27:22 -0700 Subject: Comment wbdiff SNF 2009-09-11 10:41:18: resistivity changed on spin rinse dryer Message-ID: 16 meg ohm is correct From latta at snf.stanford.edu Tue Oct 20 17:28:15 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:28:15 -0700 Subject: Problem wbdiff SNF 2009-09-15 16:58:30: SRD Message-ID: dry time increased as was spin speed From latta at snf.stanford.edu Tue Oct 20 17:28:29 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:28:29 -0700 Subject: Comment wbdiff SNF 2009-09-17 20:11:27: Out of chemical change logsheet Message-ID: replaced From latta at snf.stanford.edu Tue Oct 20 17:28:40 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:28:40 -0700 Subject: Comment wbdiff SNF 2009-09-18 08:01:26: Need more log sheets (eom) Message-ID: done From latta at snf.stanford.edu Tue Oct 20 17:29:01 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:29:01 -0700 Subject: Problem wbdiff SNF 2009-09-23 20:28:54: SRD Message-ID: resistivity meter issues From latta at snf.stanford.edu Tue Oct 20 17:29:10 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:29:10 -0700 Subject: Problem wbdiff SNF 2009-09-28 17:32:00: boxes need to be cleaned Message-ID: noted From latta at snf.stanford.edu Tue Oct 20 17:29:34 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:29:34 -0700 Subject: Comment wbdiff SNF 2009-10-04 15:28:53: many crystals around 6:1 BOE Message-ID: cleaned up From fanpy at snf.stanford.edu Wed Oct 21 01:31:33 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Wed, 21 Oct 2009 01:31:33 -0700 Subject: Problem wbdiff SNF 2009-10-21 01:31:32: spin dryer not workin Message-ID: nothing happens after pressing start button From jhaydon at snf.stanford.edu Wed Oct 21 08:38:15 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:38:15 -0700 Subject: Problem wbdiff SNF 2009-10-21 01:31:32: spin dryer not workin Message-ID: connector was not making good contact From jhaydon at snf.stanford.edu Wed Oct 21 08:40:39 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:40:39 -0700 Subject: Problem wbdiff SNF 2009-10-20 15:58:41: Water dripping behind the SRD Message-ID: Drainline from front tray came loose Ed reinstalled and tightened it From jhaydon at snf.stanford.edu Wed Oct 21 08:43:27 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 21 Oct 2009 08:43:27 -0700 Subject: Problem wbdiff SNF 2009-10-20 14:30:53: srd problem going to drying step Message-ID: Ran SRD this morningwith no cassette got 17.2 Meghom From mcherry at snf.stanford.edu Wed Oct 21 12:02:02 2009 From: mcherry at snf.stanford.edu (mcherry at snf.stanford.edu) Date: Wed, 21 Oct 2009 12:02:02 -0700 Subject: Problem wbdiff SNF 2009-10-21 12:02:01: Spin Dryer Message-ID: I couldn't get the spin dryer to pass the rinse cycle. From ryhuang at snf.stanford.edu Wed Oct 21 13:25:23 2009 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Wed, 21 Oct 2009 13:25:23 -0700 Subject: Comment wbdiff SNF 2009-10-21 13:25:23: SRD OK after 2 rinses... Message-ID: I had to rinse my wafers twice, but the 2nd time, the resistivity reached >15Mohm-cm, and the cycle completed fine. -Robert From jhaydon at snf.stanford.edu Mon Oct 26 06:52:24 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Oct 2009 06:52:24 -0700 Subject: Problem wbdiff SNF 2009-10-21 12:02:01: Spin Dryer Message-ID: I will replace SRD with a refurbished unit probably next week. From cursive at snf.stanford.edu Thu Oct 29 11:16:35 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 29 Oct 2009 11:16:35 -0700 Subject: Problem wbdiff SNF 2009-10-29 11:16:34: rinse for a long time, can't change to dry mode Message-ID: The rinse time shows "999", and top resistivity shows 6.7 value.