Problem wbdiff SNF 2009-10-20 14:30:53: srd problem going to drying step

rostam at snf.stanford.edu rostam at snf.stanford.edu
Tue Oct 20 14:30:53 PDT 2009


The spin-rinse-dryer reading was showing 11 and its setpoint was 16. The spin-rinse-dryer continued rinsing my wafers for >10 min extra before going to drying step.




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