Problem wbdiff SNF 2009-10-20 14:30:53: srd problem going to drying step

rostam at rostam at
Tue Oct 20 14:30:53 PDT 2009

The spin-rinse-dryer reading was showing 11 and its setpoint was 16. The spin-rinse-dryer continued rinsing my wafers for >10 min extra before going to drying step.

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