Problem wbdiff SNF 2009-09-15 16:58:30: SRD

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Sep 15 16:58:31 PDT 2009


1. got stuck in the rinse cycle.  resistivity at ~15 mohm-cm after ~20min.
2. wafers still had some beads of water after dry cycle.




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