From uli at snf.stanford.edu Thu Feb 4 15:46:57 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 4 Feb 2010 15:46:57 -0800 Subject: Problem wbdiff SNF 2010-01-16 11:07:39: Second tank Message-ID: you can't use the timer in case the overtemp alarm starts From tura at snf.stanford.edu Fri Feb 5 08:54:37 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 5 Feb 2010 08:54:37 -0800 Subject: Problem wbdiff SNF 2010-02-05 08:54:36: HCl bath LL alarm Message-ID: Low liquid alarm was on even though the level was fine. From jhaydon at snf.stanford.edu Fri Feb 5 10:22:43 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 5 Feb 2010 10:22:43 -0800 Subject: Problem wbdiff SNF 2010-02-05 08:54:36: HCl bath LL alarm Message-ID: replaced level switch From yeh at snf.stanford.edu Fri Feb 5 15:11:12 2010 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 5 Feb 2010 15:11:12 -0800 Subject: Problem wbdiff SNF 2010-02-05 15:11:12: SRD not reaching resistivity setpoint Message-ID: previous user had an empty boat that did not reach resistivity setpoint after several rinse cycles. my boat with ~10 wafers (patterned thermal oxide) also did not reach resitivity setpoint after a rinse cycle. From khoang at snf.stanford.edu Fri Feb 5 15:49:25 2010 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Fri, 5 Feb 2010 15:49:25 -0800 Subject: Problem wbdiff SNF 2010-02-05 15:49:24: SRD not able to reach resist. setpoint Message-ID: my empty boat with a full clean cycle could not reach the resist. setpoint. From uli at snf.stanford.edu Fri Feb 5 17:40:56 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 5 Feb 2010 17:40:56 -0800 Subject: Problem wbdiff SNF 2010-02-05 15:49:24: SRD not able to reach resist. setpoint Message-ID: diff cleaned 25 wafers, SRD reached resistivity set point of 16. From uli at snf.stanford.edu Fri Feb 5 17:41:05 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 5 Feb 2010 17:41:05 -0800 Subject: Problem wbdiff SNF 2010-02-05 15:11:12: SRD not reaching resistivity setpoint Message-ID: diff cleaned 25 wafers, SRD reached resistivity set point of 16. From jparker at snf.stanford.edu Tue Feb 23 09:48:01 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 23 Feb 2010 09:48:01 -0800 Subject: Problem wbdiff SNF 2010-02-23 09:48:01: HCl heater does not turn on Message-ID: "Low liquid level" stays on even when liquid is full, so heater cannot be turned on. From jhaydon at snf.stanford.edu Wed Feb 24 07:37:27 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 24 Feb 2010 07:37:27 -0800 Subject: Problem wbdiff SNF 2010-02-23 09:48:01: HCl heater does not turn on Message-ID: installed new switch From rostam at snf.stanford.edu Sun Feb 28 10:09:55 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 28 Feb 2010 10:09:55 -0800 Subject: Problem wbdiff SNF 2010-02-28 10:09:55: hcl low level Message-ID: although the level of liquid in the hcl tank is where it should be, the low-level light is on and i can't turn on the heater. the bench is enabled.