From narii at snf.stanford.edu Sun Nov 7 23:23:46 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 7 Nov 2010 23:23:46 -0800 Subject: Problem wbdiff SNF 2010-11-07 23:23:46: particles in HF 2% bath Message-ID: Looks like a wafer fragment From pponce at snf.stanford.edu Fri Nov 12 21:47:16 2010 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Fri, 12 Nov 2010 21:47:16 -0800 Subject: Problem wbdiff SNF 2010-11-12 21:47:16: right dump rinser Message-ID: The rightmost dump rinser is not draining at all. It is unresponsive to pushing "open" and does not drain during wafer rinsing. From jprovine at snf.stanford.edu Tue Nov 16 15:21:36 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 16 Nov 2010 15:21:36 -0800 Subject: Problem wbdiff SNF 2010-11-16 15:21:36: srd not able to reach resistivity setpoint Message-ID: running new, blank, pre-cleaned wafers i was unable to get the spin rinse dryer to reach the resistivity setpoint during the rinse cycle. running just the cassette through and it reached 16.0Mohm-cm only after the allotted time was over. the cassette in question needs cleaning and i put it on top of the srd. i did not take it out of circulation because it is borderline and there are currently only two cassettes at wbdiff. From jhaydon at snf.stanford.edu Thu Nov 18 16:20:54 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 18 Nov 2010 16:20:54 -0800 Subject: Problem wbdiff SNF 2010-11-18 16:20:53: do not use right dump rinser drain valve is not working correctly Message-ID: From uli at snf.stanford.edu Fri Nov 19 15:32:09 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:32:09 -0800 Subject: Problem wbdiff SNF 2010-11-18 16:20:53: do not use right dump rinser drain valve is not working correctly Message-ID: fixed From uli at snf.stanford.edu Fri Nov 19 15:32:54 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:32:54 -0800 Subject: Problem wbdiff SNF 2010-11-16 15:21:36: srd not able to reach resistivity setpoint Message-ID: Ran cassette without problem. From uli at snf.stanford.edu Fri Nov 19 15:33:15 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:33:15 -0800 Subject: Problem wbdiff SNF 2010-11-12 21:47:16: right dump rinser Message-ID: fixed From uli at snf.stanford.edu Fri Nov 19 15:33:48 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:33:48 -0800 Subject: Problem wbdiff SNF 2010-11-07 23:23:46: particles in HF 2% bath Message-ID: cleaned From uli at snf.stanford.edu Fri Nov 19 15:33:58 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:33:58 -0800 Subject: Problem wbdiff SNF 2010-10-26 14:08:20: some cassetes with black spots on them Message-ID: cleaned From uli at snf.stanford.edu Fri Nov 19 15:34:34 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:34:34 -0800 Subject: Comment wbdiff SNF 2010-10-25 16:17:44: low on DIFF cassettes today Message-ID: There should be six wbdiff cassettes. From uli at snf.stanford.edu Fri Nov 19 15:35:07 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:35:07 -0800 Subject: Comment wbdiff SNF 2010-09-16 09:24:58: found 5:1:1 bath completely empty Message-ID: From uli at snf.stanford.edu Fri Nov 19 15:35:11 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 19 Nov 2010 15:35:11 -0800 Subject: Comment wbdiff SNF 2010-09-18 17:41:05: most pieces removed Message-ID: