Problem wbdiff SNF 2010-11-16 15:21:36: srd not able to reach resistivity setpoint

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Nov 16 15:21:36 PST 2010


running new, blank, pre-cleaned wafers i was unable to get the spin rinse dryer to reach the resistivity setpoint during the rinse cycle.  running just the cassette through and it reached 16.0Mohm-cm only after the allotted time was over.  the cassette in question needs cleaning and i put it on top of the srd.  i did not take it out of circulation because it is borderline and there are currently only two cassettes at wbdiff.




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