From uli at snf.stanford.edu Mon Aug 1 11:07:38 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 1 Aug 2011 11:07:38 -0700 Subject: Problem wbdiff SNF 2011-08-01 11:07:37: Aug 2, permanent change in standard pre-furnace clean Message-ID: Dear wbdiff users: We would like you to be aware of upcoming changes in the standard pre-furnace clean procedures. We've made a reservation tomorrow, August 2nd from 10 AM to 12 PM. Instead of the 4:1 sulfuric-peroxide/HCl-SC2/HF dip sequence that has been standard at SNF for many years, we are going to use a standard RCA: SC1/SC2/HF dip. SC1 consists of 5:1:1 H2O/H2O2/NH4OH (Ammonium Hydroxide). The SC1 bath must be changed every four hours and the addition of H2O2 is allowed, much the same as the SC2 bath, 5:1:1 H2O:H2O2:HCl. The bath temperature is 50C and the time remains 10 minutes. Note: today we replaced already two rows of sulfuric acid with Ammonium Hydroxide in the right chemical passthrough. Ammonium Hydroxide is no longer in the left passthrough. SNF staff From grahamab at snf.stanford.edu Tue Aug 2 09:18:49 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 2 Aug 2011 09:18:49 -0700 Subject: Problem wbdiff SNF 2011-08-02 09:18:49: not enough wafer boxes Message-ID: there appears to be more cassettes than wafer boxes From latta at snf.stanford.edu Tue Aug 2 11:19:59 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 2 Aug 2011 11:19:59 -0700 Subject: Comment wbdiff SNF 2011-05-04 02:26:01: broken wafer Message-ID: archived From latta at snf.stanford.edu Tue Aug 2 11:20:25 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 2 Aug 2011 11:20:25 -0700 Subject: Problem wbdiff SNF 2011-07-30 21:55:19: wafer pieces at the bottom of H2O2/Hcl bath Message-ID: cleaned up From uli at snf.stanford.edu Tue Aug 2 17:54:27 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 2 Aug 2011 17:54:27 -0700 Subject: Problem wbdiff SNF 2011-08-02 09:18:49: not enough wafer boxes Message-ID: From jhaydon at snf.stanford.edu Wed Aug 3 10:47:12 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Aug 2011 10:47:12 -0700 Subject: Problem wbdiff SNF 2011-07-21 15:16:18: Door seal sticking on 4" SRD Message-ID: I could not find a problem with the door. It could be an intermittent problem with a solenoid From sclaussen at snf.stanford.edu Thu Aug 4 00:18:04 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 4 Aug 2011 00:18:04 -0700 Subject: Problem wbdiff SNF 2011-08-04 00:18:04: May have contaminated bench... Message-ID: I believe I accidentally put wafers through wbdiff that had resist on them. I drained all the baths and changed the chemicals, but am not sure if anything else needs to be done. Please let me know. From sclaussen at snf.stanford.edu Thu Aug 4 10:58:30 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 4 Aug 2011 10:58:30 -0700 Subject: Problem wbdiff SNF 2011-08-04 10:58:30: SRD door sticks when opening after cycle Message-ID: From rudy at snf.stanford.edu Fri Aug 5 10:43:35 2011 From: rudy at snf.stanford.edu (rudy at snf.stanford.edu) Date: Fri, 5 Aug 2011 10:43:35 -0700 Subject: Comment wbdiff SNF 2011-08-05 10:43:35: Left Dump Rinser and HCl Pot Message-ID: The Left Dump Rinser, in front of the SC1 clean, is making clunking noises as it fills up and dumps. The heater on the HCl pot turned off twice during the 10 min I had my wafers in it. From jprovine at snf.stanford.edu Sun Aug 7 12:51:58 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 7 Aug 2011 12:51:58 -0700 Subject: Problem wbdiff SNF 2011-08-07 12:51:58: resistivity monitor not being reached and not ALARMING Message-ID: the resistivity monitor level of 16.0mega-ohm-cm is not being reached on the wbdiff SRD. it is not stopping the rinse process, but is instead continuing to the dry stage. even empty cassettes are not reaching the 16.0Mohm-cm limit. no idea if this has to do with the bath change or not, because i am unsure how long this has been going on that the SRD completes its cycle even if the monitor level is not reached. From jhaydon at snf.stanford.edu Mon Aug 8 10:01:08 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 8 Aug 2011 10:01:08 -0700 Subject: Problem wbdiff SNF 2011-08-07 12:51:58: resistivity monitor not being reached and not ALARMING Message-ID: I tested the SRD and was able to get 17.5 Megohm overall and 16 Megohm in less than 60 seconds. Thi Is done with out a cassett. So the problem is most likely with the cassett. From jhaydon at snf.stanford.edu Mon Aug 8 10:07:13 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 8 Aug 2011 10:07:13 -0700 Subject: Problem wbdiff SNF 2011-08-04 10:58:30: SRD door sticks when opening after cycle Message-ID: This is probably caused by a sticking solenoid valve. This SRD is going to be replaced with in the next few months. Don't open it until at least a few seconds after end of cycle. From wslee at snf.stanford.edu Wed Aug 10 23:42:31 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 10 Aug 2011 23:42:31 -0700 Subject: Problem wbdiff SNF 2011-08-10 23:42:31: spin rinse dryer switches before resistivity reached Message-ID: Spin rinse dryer switches from rinsing to drying before reaching the 16MOhm resistivity (the spin rinse dryer is in 'auto' mode). From jhaydon at snf.stanford.edu Thu Aug 11 15:32:44 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 11 Aug 2011 15:32:44 -0700 Subject: Problem wbdiff SNF 2011-08-04 00:18:04: May have contaminated bench... Message-ID: taken care of From jhaydon at snf.stanford.edu Fri Aug 12 09:13:48 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 12 Aug 2011 09:13:48 -0700 Subject: Problem wbdiff SNF 2011-08-10 23:42:31: spin rinse dryer switches before resistivity reached Message-ID: replaced SRD controller From ysohn at snf.stanford.edu Sun Aug 21 13:49:41 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Sun, 21 Aug 2011 13:49:41 -0700 Subject: Comment wbdiff SNF 2011-08-21 13:49:40: SRD for 4 inch Message-ID: 4inch SRD did not work well in the first place. LED panel showed 999 instead of counting, and did not stop rinsing. So I had to turneit off and on, and run it again. From ysohn at snf.stanford.edu Sun Aug 21 13:56:51 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Sun, 21 Aug 2011 13:56:51 -0700 Subject: Comment wbdiff SNF 2011-08-21 13:56:51: SRD 4inch out of order Message-ID: rinse is ok but dry is not workiing From ysohn at snf.stanford.edu Sun Aug 21 14:00:52 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Sun, 21 Aug 2011 14:00:52 -0700 Subject: Comment wbdiff SNF 2011-08-21 14:00:51: SRD 4inch Message-ID: Another lab member helped me to fix previously reported problem. He touched resistivity monitor a couple of times and it worked. From jimkruger at snf.stanford.edu Wed Aug 24 16:40:25 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 24 Aug 2011 16:40:25 -0700 Subject: Problem wbdiff SNF 2011-08-24 16:40:25: door seal on 4"SRD slow to release Message-ID: From jprovine at snf.stanford.edu Thu Aug 25 14:01:25 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 25 Aug 2011 14:01:25 -0700 Subject: Comment wbdiff SNF 2011-08-25 14:01:25: 4" SRD left in off mode Message-ID: the resistivity monitor was not engaged because the system was left in the off mode. always return it to auto. if your wafers cannot reach the resistivity setpoint they are not clean enough to enter clean equipment and the issue should be reported on coral. From grahamab at snf.stanford.edu Thu Aug 25 15:58:56 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 25 Aug 2011 15:58:56 -0700 Subject: Problem wbdiff SNF 2011-08-25 15:58:55: resistivity monitor on SRD acting up Message-ID: first try it wouldn't go past 11.3. stopped and tried again only to reach 12.2. stopped again and restarted and not really leaving the single digits. not sure if resistivity sensor, cassette, or some other problem. From jhaydon at snf.stanford.edu Fri Aug 26 07:26:19 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:26:19 -0700 Subject: Problem wbdiff SNF 2011-08-24 16:40:25: door seal on 4"SRD slow to release Message-ID: we may have a sticky solenoid. We are replacing the SRD with in the next few months. If it becomes a more frequent I will replace the solenoid. This will probably take a couple of hours maybe longer From jhaydon at snf.stanford.edu Fri Aug 26 07:32:47 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:32:47 -0700 Subject: Problem wbdiff SNF 2011-08-25 15:58:55: resistivity monitor on SRD acting up Message-ID: SRD is fine it hit 16 meg ohm in less than 60 seconds and over 17.5 meg ohms at the end of cycle The problem is most likely with your waffers or the cassette or both. From sclaussen at snf.stanford.edu Fri Aug 26 15:32:54 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 26 Aug 2011 15:32:54 -0700 Subject: Problem wbdiff SNF 2011-08-26 15:32:54: SRD resistivity monitor Message-ID: Myself and other users were seeing the same problem, where it would not switch over to the dry step supposedly due to the resistivity not hitting the target. From junam at snf.stanford.edu Sat Aug 27 16:01:45 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sat, 27 Aug 2011 16:01:45 -0700 Subject: Comment wbdiff SNF 2011-08-27 16:01:44: previous user's samples on wbdiff Message-ID: previous user's samples are sitting in a exposed cassette (not inside a cassette box). From jhaydon at snf.stanford.edu Mon Aug 29 07:29:58 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:29:58 -0700 Subject: Problem wbdiff SNF 2011-08-26 15:32:54: SRD resistivity monitor Message-ID: You are not giving enough information. If the SRD controller is flashing 999 then you have not yet reached resistivity and it will continue to run until it has reached it. I have tested the SRD twice in the last couple of weeks and it reached 16 meg ohm in less than 60 seconds. The problem may be that the cassette needs to be replaced or your wafers are not well rinsed. I test the SRD without a cassette. From sclaussen at snf.stanford.edu Mon Aug 29 15:56:35 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 29 Aug 2011 15:56:35 -0700 Subject: Problem wbdiff SNF 2011-08-29 15:56:34: SRD Message-ID: SRD problems continue: now won't move from rinse step to dry step, AND won't do so with a simple flick of the auto-manual switch. It just keeps rinsing. I had to stop it, turn the power off, turn it back on, let it go through the rinse step, then flick the switch to get it to move over. Then the dry step was cut short for some unknown reason. I repeated this twice, with two different cassettes and two different sets of clean wafers. From fpurkl at snf.stanford.edu Mon Aug 29 19:12:14 2011 From: fpurkl at snf.stanford.edu (fpurkl at snf.stanford.edu) Date: Mon, 29 Aug 2011 19:12:14 -0700 Subject: Problem wbdiff SNF 2011-08-29 19:12:13: SRD Message-ID: For my first SRD run, the drying was also cut short as described by sclaussen and the wafers were still wet. For the second run, during the drying cycle the display suddenly went black. It would occasionally come back on, starting to count down from 400 s and then immediately go black again. I eventually had to shut off the tool to get my wafers out. From latta at snf.stanford.edu Tue Aug 30 15:05:13 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 30 Aug 2011 15:05:13 -0700 Subject: Problem wbdiff SNF 2011-08-30 15:05:13: SRD again Message-ID: I tried to test the cassettes by running them in the SRD and checking the resistivity. The tool shows 'err' instead of a number. Other users have reported that the res never got to 16. In the back of the tool there is a disconnected connector, possibly the resistivity sensor. I tried to re-connect it but there was no change. It may well be for the 6in SRD. Also the sticking door took about 5 mins before I gave up and gently yanked it open. I know these are due to be replaced soon, but this condition is going to result in someone yanking too soon, too hard and rendering the door unsealable. Perhaps the door and res issues are related? From wslee at snf.stanford.edu Tue Aug 30 18:12:35 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 30 Aug 2011 18:12:35 -0700 Subject: Problem wbdiff SNF 2011-08-30 18:12:35: SRD again and again Message-ID: A few users ahead of me let the SRD run in rinse mode for a really long time (~30+ min). Resistivity went above 16 but it would not switch to dry cycle. Finally, I switched it to manual mode and it switched to dry but the program stopped after about 10s. We reran the cassette without removing it, it hit 16Mohms really quickly and then it dried just fine. My cassette took a little longer than normal to hit 16MOhm.