Problem wbdiff SNF 2011-03-10 12:30:31: spin rinse dryer

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Mar 10 12:30:32 PST 2011


for maybe the thousandth time i found the srd in manual mode.  it should be in automatic mode, and if you needed to change it to manual to get your wafers through you should report the issue with reaching resistivity and then ALWAYS PUT IT BACK IN AUTO MODE.




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