From wslee at snf.stanford.edu Tue May 3 20:26:36 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 3 May 2011 20:26:36 -0700 Subject: Problem wbdiff SNF 2011-05-03 20:26:35: 6" spin rinse dryer Message-ID: I quite often find it spinnin and rinsin without being told to do so. From ysohn at snf.stanford.edu Wed May 4 01:00:14 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Wed, 4 May 2011 01:00:14 -0700 Subject: Problem wbdiff SNF 2011-05-04 01:00:14: wafer broke inside the spin dry Message-ID: I accidentally broke the wafer insde the 4 inch spin rinse dryer. I tried to clear broken pieces as best as I can but still there might be tiny pieces inside it. And also one station 4-inch casette is covered with tiny broken pieces. I put it on the splash shield From ysohn at snf.stanford.edu Wed May 4 02:26:02 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Wed, 4 May 2011 02:26:02 -0700 Subject: Comment wbdiff SNF 2011-05-04 02:26:01: broken wafer Message-ID: after discussing previous problem with senior labmember, I cleaned the casette by running through entire prediffusion cleaning process again and the spin rinse dryer was also cleaned by running empty casette. After that I used spin rinse dryer for my wafer and it looks like it is working fine. From uli at snf.stanford.edu Thu May 5 15:14:46 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 5 May 2011 15:14:46 -0700 Subject: Problem wbdiff SNF 2011-05-04 01:00:14: wafer broke inside the spin dry Message-ID: cleaned From uli at snf.stanford.edu Thu May 5 15:15:24 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 5 May 2011 15:15:24 -0700 Subject: Problem wbdiff SNF 2011-04-19 12:40:52: missing cassette box found, has etch cassette in it Message-ID: cleaned From uli at snf.stanford.edu Thu May 5 15:15:43 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 5 May 2011 15:15:43 -0700 Subject: Problem wbdiff SNF 2011-04-18 17:06:13: Missing cassette box Message-ID: cleaned From uli at snf.stanford.edu Thu May 5 15:16:56 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 5 May 2011 15:16:56 -0700 Subject: Problem wbdiff SNF 2011-04-18 11:55:42: Teflon level indicator missing in HCl bath Message-ID: Teflon level indicator installed. From uli at snf.stanford.edu Thu May 5 15:18:20 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 5 May 2011 15:18:20 -0700 Subject: Problem wbdiff SNF 2011-03-16 14:21:05: dryer controller problem Message-ID: Controller installed: 180sec rinse, 400 sec dry From junam at snf.stanford.edu Thu May 12 01:50:16 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Thu, 12 May 2011 01:50:16 -0700 Subject: Problem wbdiff SNF 2011-05-12 01:50:15: wafer pieces in 50:1 HF tank Message-ID: found several wafer pieces floating in the left HF tank. From junam at snf.stanford.edu Sun May 15 18:19:13 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 15 May 2011 18:19:13 -0700 Subject: Comment wbdiff SNF 2011-05-15 18:19:12: boe crystals & ... Message-ID: boe crystals by HF section. liquids all over the wb. dump rinsers were empty and found a holder in a dump rinser From kcbalram at snf.stanford.edu Sun May 15 19:59:43 2011 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 15 May 2011 19:59:43 -0700 Subject: Problem wbdiff SNF 2011-05-15 19:59:42: Wafer pieces in the HCl:H2O2 bath Message-ID: Several broken silicon pieces were found in the HCl:H2O2 bath. They wer clogging the drain and the bath is not draining completely. From arion at snf.stanford.edu Sun May 22 19:28:24 2011 From: arion at snf.stanford.edu (arion at snf.stanford.edu) Date: Sun, 22 May 2011 19:28:24 -0700 Subject: Comment wbdiff SNF 2011-05-22 19:28:24: piece Message-ID: I found a small wafer piece in the middle SRD. From npapte at snf.stanford.edu Mon May 23 09:32:44 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Mon, 23 May 2011 09:32:44 -0700 Subject: Comment wbdiff SNF 2011-05-23 09:32:43: some film floating in the piranha bath Message-ID: some dark colored film floating in the piranha bath. might be photoresist. Also, saw several broken wafer pieces in teh HCl bath. Bath does not drain easily From npapte at snf.stanford.edu Mon May 23 14:13:37 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Mon, 23 May 2011 14:13:37 -0700 Subject: Comment wbdiff SNF 2011-05-23 14:13:37: removed wafer pieces from piranha and HCl baths Message-ID: cleaned the wafer pieces from both the piranha and HCl bath