From jprovine at snf.stanford.edu Thu Oct 6 08:52:00 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 6 Oct 2011 08:52:00 -0700 Subject: Problem wbdiff SNF 2011-10-06 08:51:59: resistivity issues Message-ID: brand new wafers and empty cassetttes are both failing to reach resistivity set point. in some cases by many megaohm-cms. From jprovine at snf.stanford.edu Thu Oct 6 12:03:40 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 6 Oct 2011 12:03:40 -0700 Subject: Comment wbdiff SNF 2011-10-06 12:03:40: resistivity issues update Message-ID: i spoke with Uli. concern has grown about the style of cassettes used and the ability to thoroughly rinse and dry these in reasonable amounts of time. the problem then tends to compound until the cassettes need to be replaced. a new SRD for wbdiff and new cassettes with new design have been purchased which will hopefully alleviate these resistivity issues. the new SRD and new cassettes are intended to be introduced prior to the holiday shutdown. From gsosa at snf.stanford.edu Fri Oct 7 08:11:42 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Oct 2011 08:11:42 -0700 Subject: Problem wbdiff SNF 2011-09-22 10:46:13: !st dump rinser not filling up Message-ID: Replaced the quick-dump valve and reprogrammed the dump rinse controller. Tested OK. From scrippen at snf.stanford.edu Thu Oct 20 15:43:46 2011 From: scrippen at snf.stanford.edu (scrippen at snf.stanford.edu) Date: Thu, 20 Oct 2011 15:43:46 -0700 Subject: Problem wbdiff SNF 2011-10-20 15:43:45: spin/dry Message-ID: spin/dry powered off during use and will not power back on. From gsosa at snf.stanford.edu Thu Oct 20 16:59:38 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Oct 2011 16:59:38 -0700 Subject: Problem wbdiff SNF 2011-10-20 15:43:45: spin/dry Message-ID: Replaced the 15a fuse in the SRD Controller. Tested operation with 2 complete cycles-OK. From gsosa at snf.stanford.edu Fri Oct 21 16:11:10 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Oct 2011 16:11:10 -0700 Subject: Problem wbdiff SNF 2011-10-21 16:11:10: Water leak 10/21 Message-ID: Water leak in 4" spin drier. From gsosa at snf.stanford.edu Fri Oct 21 19:06:49 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Oct 2011 19:06:49 -0700 Subject: Problem wbdiff SNF 2011-10-21 16:11:10: Water leak 10/21 Message-ID: Drain box on SRD was overfilling due to wafer chips in the drain. Was able to clear the drain of the wafer chips. Ran several cycles. Drain box is draining very well now. From uli at snf.stanford.edu Tue Oct 25 15:37:48 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 25 Oct 2011 15:37:48 -0700 Subject: Problem wbdiff SNF 2011-08-01 11:07:37: Aug 2, permanent change in standard pre-furnace clean Message-ID: make it a comment From uli at snf.stanford.edu Tue Oct 25 15:40:55 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 25 Oct 2011 15:40:55 -0700 Subject: Comment wbdiff SNF 2011-10-25 15:40:54: Aug 2nd new SC1 Message-ID: Change in standard pre-furnace clean procedures: Instead of the 4:1 sulfuric-peroxide/HCl-SC2/HF dip sequence that has been standard at SNF for many years, we are going to use a standard RCA: SC1/SC2/HF dip. SC1 consists of 5:1:1 H2O/H2O2/NH4OH (Ammonium Hydroxide). The SC1 bath must be changed every four hours and the addition of H2O2 is allowed, much the same as the SC2 bath, 5:1:1 H2O:H2O2:HCl. The bath temperature is 50C and the time remains 10 minutes. From jaehlee at snf.stanford.edu Fri Oct 28 13:33:14 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 28 Oct 2011 13:33:14 -0700 Subject: Comment wbdiff SNF 2011-10-28 13:33:13: HF crystals around BOE6:1 bath Message-ID: I am cleaning now. From jaehlee at snf.stanford.edu Fri Oct 28 18:07:44 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 28 Oct 2011 18:07:44 -0700 Subject: Comment wbdiff SNF 2011-10-28 18:07:44: SRD was in manual mode. Message-ID: I thought it should always be in auto mode.