From jhaydon at snf.stanford.edu Thu Sep 1 08:05:06 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 1 Sep 2011 08:05:06 -0700 Subject: Problem wbdiff SNF 2011-08-29 15:56:34: SRD Message-ID: controller replaced From jhaydon at snf.stanford.edu Thu Sep 1 08:05:38 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 1 Sep 2011 08:05:38 -0700 Subject: Problem wbdiff SNF 2011-08-29 19:12:13: SRD Message-ID: controller replaced From jhaydon at snf.stanford.edu Thu Sep 1 08:11:52 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 1 Sep 2011 08:11:52 -0700 Subject: Problem wbdiff SNF 2011-08-30 15:05:13: SRD again Message-ID: controller has been replaced and the door adjusted From jhaydon at snf.stanford.edu Thu Sep 1 08:13:15 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 1 Sep 2011 08:13:15 -0700 Subject: Problem wbdiff SNF 2011-08-30 18:12:35: SRD again and again Message-ID: controller has been replaced and door has been adjusted From bchui at snf.stanford.edu Thu Sep 1 18:04:39 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 1 Sep 2011 18:04:39 -0700 Subject: Problem wbdiff SNF 2011-09-01 18:04:39: Extra DIFF cassette w/o a box.... Message-ID: After finishing my wafer clean at wbdiff, I found that I couldn't find an empty DIFF box to return the cassette to. I looked in every box and found that the enclosed cassette in each box had no COLORED button (i.e. seemingly OK). However, upon closer inspection I noticed that one of the cassettes had no button at all. At the same time, I noticed that there's an extra empty ETCH box by wbnonmetal. I wonder if the yellow button fell off an ETCH cassette and someone mistook it for a DIFF cassette and put it in the wrong box. From rudy at snf.stanford.edu Fri Sep 2 10:55:09 2011 From: rudy at snf.stanford.edu (rudy at snf.stanford.edu) Date: Fri, 2 Sep 2011 10:55:09 -0700 Subject: Comment wbdiff SNF 2011-09-02 10:55:08: Leak in Dump Rinser for HCl Bath Message-ID: The dump rinser in front of the Hydrochloric bath seems like it has a small leak. After pressing open to remove a cassette and pressing the up arrow to refill it, the dump rinser only fills up to a couple inches from the top instead of getting to the point where it is overflowing. The water level also seems to drop over time. From ylyang at snf.stanford.edu Fri Sep 2 18:35:01 2011 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Fri, 2 Sep 2011 18:35:01 -0700 Subject: Problem wbdiff SNF 2011-09-02 18:35:00: dryer stops after rinser circle Message-ID: From grahamab at snf.stanford.edu Sun Sep 4 10:19:59 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 4 Sep 2011 10:19:59 -0700 Subject: Problem wbdiff SNF 2011-09-04 10:19:58: resistivity issues Message-ID: after rinsing for 180s, the resistance had reached about 10. I stopped the cycle and restarted. it reached about 12.7 after 60s and then started decreasing back to below 11 over the next two minutes. wafers went through the standard order of baths (from left to right, HF dip last before a final dumprinse) if the problem is with the cassettes, then that should be addressed. running it without a cassette isn't helpful for people who have wafers that have to go in cassettes. From chienyuc at snf.stanford.edu Wed Sep 7 13:59:25 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 7 Sep 2011 13:59:25 -0700 Subject: Comment wbdiff SNF 2011-09-07 13:59:25: close lid after use Message-ID: Please do that otherwise the dump/rinser autofill will mess up the bench. From eldwin at snf.stanford.edu Tue Sep 20 14:50:14 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Tue, 20 Sep 2011 14:50:14 -0700 Subject: Problem wbdiff SNF 2011-09-20 14:50:13: center dump rinser will not reset Message-ID: counter says 0 and will not reset to 5 From uli at snf.stanford.edu Tue Sep 20 17:30:37 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 20 Sep 2011 17:30:37 -0700 Subject: Problem wbdiff SNF 2011-09-20 14:50:13: center dump rinser will not reset Message-ID: Switched bench off and on, center dump rinser works again. From maurice at snf.stanford.edu Thu Sep 22 10:46:14 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Sep 2011 10:46:14 -0700 Subject: Problem wbdiff SNF 2011-09-22 10:46:13: !st dump rinser not filling up Message-ID: The dump rinser in front of the Amonium hydroxide bath is not filling up with water From uli at snf.stanford.edu Thu Sep 22 17:00:39 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 22 Sep 2011 17:00:39 -0700 Subject: Problem wbdiff SNF 2011-09-02 18:35:00: dryer stops after rinser circle Message-ID: fixed From uli at snf.stanford.edu Thu Sep 22 17:06:30 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 22 Sep 2011 17:06:30 -0700 Subject: Problem wbdiff SNF 2011-09-01 18:04:39: Extra DIFF cassette w/o a box.... Message-ID: fixed From dongrip at snf.stanford.edu Sun Sep 25 11:37:31 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 11:37:31 -0700 Subject: Problem wbdiff SNF 2011-09-25 11:37:31: Light pen doesn't work Message-ID: Light pen doesn't work, but another one behind the equipment is still functional. Please take a look. From dongrip at snf.stanford.edu Sun Sep 25 11:40:30 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 11:40:30 -0700 Subject: Problem wbdiff SNF 2011-09-25 11:40:29: HCL flow deviation during the Ge etch coat. Message-ID: When running Ge etch coat, HCl flow deviation (6%~8%) error occurred. Specifically, when reaching to the 980 sccm target value of HCL during the cleaning, it happens due to slowly reaching the target value. This sometimes happens, but sometimes not. From dongrip at snf.stanford.edu Sun Sep 25 11:42:08 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 11:42:08 -0700 Subject: Problem wbdiff SNF 2011-09-25 11:42:07: please disregard two previous problem reports Message-ID: Please disregard two previous problem reports... Those are for epi2. I put the problem reports mistakenly in a wrong place. Sorry for your inconvenience. From jhaydon at snf.stanford.edu Mon Sep 26 08:24:26 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Sep 2011 08:24:26 -0700 Subject: Problem wbdiff SNF 2011-09-25 11:37:31: Light pen doesn't work Message-ID: Oops From jhaydon at snf.stanford.edu Mon Sep 26 08:24:37 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Sep 2011 08:24:37 -0700 Subject: Problem wbdiff SNF 2011-09-25 11:40:29: HCL flow deviation during the Ge etch coat. Message-ID: Oops From jhaydon at snf.stanford.edu Mon Sep 26 08:24:52 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 26 Sep 2011 08:24:52 -0700 Subject: Problem wbdiff SNF 2011-09-25 11:42:07: please disregard two previous problem reports Message-ID: Ok From lindaw at snf.stanford.edu Mon Sep 26 12:29:07 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 26 Sep 2011 12:29:07 -0700 Subject: Comment wbdiff SNF 2011-09-26 12:29:06: left most dump rinser need reprogramming Message-ID: Not only is it not filling up with water, but when you press the start button, the spray nozzles start running. In the normal program, the bottom water inputs fill first for about 1 minute, then the spray nozzles on top start. It looks like someone messed with the program for the dump rinser.