Problem wbdiff SNF 2011-09-04 10:19:58: resistivity issues

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sun Sep 4 10:19:59 PDT 2011


after rinsing for 180s, the resistance had reached about 10.  I stopped the cycle and restarted.  it reached about 12.7 after 60s and then started decreasing back to below 11 over the next two minutes.  wafers went through the standard order of baths (from left to right, HF dip last before a final dumprinse)
if the problem is with the cassettes, then that should be addressed.  running it without a cassette isn't helpful for people who have wafers that have to go in cassettes.  




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